Ejector devices, methods, drivers, and circuits therefor

ABSTRACT

In a piezoelectric ejector assembly, a piezoelectric actuator is attached to an ejector mechanism, while a drive signal generator and a controller are coupled to the actuator. The drive signal generator is configured to generate a drive signal for driving the actuator to oscillate the ejector assembly. The controller is configured to control the drive signal generator to drive the actuator at a resonant frequency of the ejector assembly, and an auto-tuning circuit is provided to define the optimum drive signal frequency.

RELATED APPLICATIONS

This application claims the benefit of the filing date of U.S.Application Nos. 61/647,359, filed May 15, 2012, entitled “Methods,Drivers and Circuits for Ejector Devices and Systems”, 61/722,556, filedNov. 5, 2012, entitled “Ejector Device and Resonance Function DriverTherefor”, and 61/722,584, filed Nov. 5, 2012, entitled “On DemandDroplet Generation Device”, the contents of which are hereinincorporated by reference in their entireties.

FIELD OF THE DISCLOSURE

The systems, methods and apparatuses disclosed herein relate generallyto the field of electromechanical systems. More specifically, thesystems, methods and apparatuses described herein may be used to drive,monitor and control a droplet generation ejector system.

BACKGROUND OF THE DISCLOSURE

Piezoelectric actuators are electronic components that undergomechanical distortion when voltage is applied across them. Under theinfluence of voltage, the crystalline structure of the piezoelectricmaterial, e.g. ceramic, is affected such that the piezoelectric materialwill change shape. For example, if an alternating electric field isapplied to a piezoelectric material, it will vibrate (contracting andexpanding) at the frequency of the applied signal. This property ofpiezoelectric materials can be exploited to produce effective actuators—electronic components that can be used to displace a mechanical load.As voltage is applied to a piezoelectric actuator, the resulting changein the piezoelectric material's shape and size displaces the mechanicalload. The electrical signals applied to a piezoelectric actuator arecommonly either single-tone, i.e., single-frequency, or square-waveinputs.

In certain configurations, when a drive signal having sufficient voltageand appropriate frequency/frequencies is applied to a piezoelectricactuator, the piezoelectric actuator may induce movement in a mechanicalload such as a fluid, generating droplets of the fluid, which may beejected as a stream of droplets. During generation of an ejected streamof droplets, improved piezoelectric drivers, driver systems and methodsof driving are generally desirable.

SUMMARY OF THE DISCLOSURE

The present disclosure is directed to a droplet ejector device andmethod of driving such a device. The droplet ejector device may comprisean actuator coupled to a droplet generator plate to define an ejectorassembly, and driver and feedback circuits. The droplet generator platemay include a plurality of openings in fluid communication with a fluidreservoir, to be loaded with the fluid. The driver circuit is in signalcommunication with the actuator, and configured to drive the actuatorbased on a drive waveform. The feedback circuit is in signalcommunication with the actuator and the driver circuit, and isconfigured to determine a relaxation time based on a feedback signalindicative of oscillation of the fluid-loaded droplet generator plate.The drive waveform comprises a first drive sequence separated from asecond drive sequence by a relaxation period based on the relaxationtime of the fluid-loaded droplet generator plate and actuator.

Further, according to the disclosure there is provided a driver circuitand a drive signal or drive waveform for a piezoelectric ejector deviceor of a droplet generator that may be included in a piezoelectricdevice.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a cross-sectional view of one embodiment of an ejectorassembly of the disclosure.

FIGS. 2A and 2B are cross-sectional views of one embodiment of anactivated ejector plate for an ejector assembly of the disclosure.

FIG. 3A is a schematic view of one embodiment of an ejector mechanismfor an ejector assembly, of the disclosure in a symmetric configuration.

FIG. 3B is a dismantled view of an embodiment of a symmetric ejectormechanism of the disclosure.

FIG. 3C is a plan view of an embodiment of a symmetric ejector mechanismof the disclosure.

FIG. 4 is a cross-sectional view through part of an embodiment of anejector mechanism of the disclosure.

FIG. 5 is a block diagram of one embodiment of a system for driving andcontrolling a piezoelectric actuator according to the presentdisclosure.

FIG. 6 is a schematic circuit diagram of a modified buck-boost converterof the disclosure.

FIG. 7 is a schematic circuit diagram of one embodiment of a modifiedboost converter of the disclosure used to convert battery voltages from2 to 3 volts up to as high as 60 V output to drive a full bridge and/ora resonant converter.

FIG. 8 is a schematic circuit diagram of one embodiment of a driving aresonant converter of the disclosure.

FIG. 9 is a block diagram of one embodiment of a driver of thedisclosure making use of a boost converter.

FIG. 10 is a block diagram of one embodiment of a multi-tone driver andresonance detection and control circuit according to the presentdisclosure.

FIG. 11 shows the time-varying voltage output of one embodiment of atwo-tone driver according to the disclosure.

FIG. 12 is a block diagram of another embodiment of a multi-tone driverand resonance detection and control circuit according to the presentdisclosure.

FIG. 13 is a block diagram of yet another embodiment of a multi-tonedriver and resonance detection and control circuit according to thepresent disclosure.

FIG. 14 is a block diagram of yet another embodiment of a multi-tonedriver and resonance detection and control circuit according to thepresent disclosure.

FIG. 15 is a schematic circuit diagram of one embodiment of a driveraccording to the present disclosure.

FIG. 16 is a block diagram of yet another embodiment of a multi-tonedriver and resonance detection and control circuit according to thepresent disclosure.

FIG. 17 is a circuit diagram of one embodiment of a full bridge circuitwith a TEP measurement circuit.

FIG. 18 is an enlarged view of the TEP measurement portion of thecircuit of FIG. 17.

FIG. 19 is a Voltage vs. Time waveform showing resonant and non-resonantdecay.

FIG. 20 is a flow diagram illustrating one embodiment of a method ofdetermining resonance of an electromechanical mechanism.

FIG. 21 is a flow diagram illustrating another embodiment of a method ofdetermining resonance of an electromechanical mechanism.

FIG. 22 shows a sample waveform (amplitude versus frequency) of anintegrated signal of one embodiment of a mechanism according to thepresent disclosure.

FIG. 23 shows a sample waveform (amplitude versus frequency) of anintegrated signal of another embodiment of a mechanism according to thepresent disclosure.

FIG. 24 is a block diagram of another embodiment of a driver andresonance detection and control circuit according to the presentdisclosure.

FIG. 25 is a block diagram of yet another embodiment of a driver andresonance detection and control circuit according to the presentdisclosure.

FIG. 26 is a block diagram of yet another embodiment of a driver andresonance detection and control circuit according to the presentdisclosure.

FIG. 27 is a block diagram of one embodiment of a TEP resonancedetection circuit.

FIG. 28 is a block diagram of one embodiment of a bypass for a resonancedetection and control circuit according to the present disclosure.

FIG. 29 shows driver signals and resonance detection and control circuitsignals according to one embodiment of the present disclosure.

FIG. 30 is a schematic circuit diagram of one embodiment of a levelshifting driver to take complementary waveform generator output to drivelevels necessary for full bridge operation according to the presentdisclosure.

FIG. 31 is a Mass Deposition vs. Frequency waveform for oneimplementation of the present disclosure.

FIG. 32 is an Integrated Voltage vs. Frequency for a resonancemeasurement output according to one implementation of the presentdisclosure.

FIG. 33 is a schematic circuit diagram of one embodiment of a gatedoscillator boost circuit for a driver system.

FIG. 34A is a plot of an exemplary fluid relaxation waveform.

FIG. 34B is an expanded view of the fluid relaxation waveform in FIG.34A.

FIGS. 35A-D are plots of examples of waveforms for ring-down damping.

FIG. 36 is a plot of a relaxation waveform following removal of a drivesignal.

FIG. 37 is a plot of a relaxation waveform following a soft ramp down ofthe drive signal.

FIG. 38A is a plot of a relaxation waveform after a five-cycleexcitation, showing harmonic production (“beating”) of the ring-downsignal.

FIG. 38B is an expanded view of the relaxation waveform in FIG. 38A.

FIG. 39A is a plot of a fluid relaxation waveform after a ten-cycleexcitation with an added damping signal, showing reduced relaxation timeand harmonic production.

FIG. 39B is an expanded view of the relaxation waveform in FIG. 39A.

FIG. 40 is a plot of a relaxation waveform after a ten-cycle square waveexcitation, with a damping signal.

FIG. 41 is a plot of the relaxation waveform without a damping signal.

FIG. 42 is a plot of a relaxation waveform after two periods of a tencycle square wave drive with damping signal and relaxation dead time.

FIG. 43 is block diagram of one embodiment of a drive signal generator.

FIG. 44 is a schematic circuit diagram of one embodiment of a levelshifter circuit.

FIG. 45 is a schematic circuit diagram of one embodiment of an IR volumedetection circuit.

FIG. 46 is a schematic circuit diagram of one embodiment of a 2× chargepump.

FIG. 47 is a schematic circuit diagram of one embodiment of two boostconverters acting as a charge pump and piezo driver, according to thedisclosure.

FIG. 48 is a schematic circuit diagram of one embodiment of amicrocontroller of the disclosure.

FIG. 49 shows a circuit diagram of one embodiment of a set of levelshifters driving a full bridge loaded with a resonant tank (includingpiezo).

FIG. 50 shows one embodiment of a TEP pulldown/droplet on demandpulldown circuit.

DETAILED DESCRIPTION

The present disclosure generally relates to ejector devices, and methodsfor their use in the delivery of fluids. In particular, the presentdisclosure relates to ejector devices and methods useful in the deliveryof fluids for ophthalmic, topical, oral, nasal, or pulmonary use,including the delivery of ophthalmic fluids to the eye. In droplet ondemand operations, one or more fluid drops may be ejected at a giventime, using the systems and method described herein to achieve theejector displacements and velocities necessary to deliver the fluid indroplet form, with desired mass transfer rates and fluid dosages, andwith reduced beading and ejector occlusion.

By way of background, in high volume droplet generation and ejectorsystems, fluid can bead on the surface of the ejector, occluding thedroplet generating openings and reducing mass transfer, sometimes forperiods of time up to several seconds or even minutes. Thus fluidbeading and related effects may make it difficult to provide thenecessary fluid ejection velocity over a pattern of ejector openings ornozzles. These challenges are particularly relevant when operating inlow velocity modes, or unfavorable eigenmode shapes. Eigenmodes ornormal modes of an oscillating system are patterns of vibration ormotion in which all parts of the system move sinusoidally with the samefrequency and with a fixed phase relation. The motion described by thenormal modes are called resonance. The frequencies of the normal modesof a system are known as its natural frequencies or resonantfrequencies. A physical object, such as a building, bridge or moleculeor, as in this case, a fluid ejector mechanism, has a set of normalmodes that depend on its structure, materials and boundary conditions.The ejected fluid may also form evaporative films on the ejectorsurface, which can substantially degrade ejector performance.

In certain embodiments, the ejector devices include an ejector mechanism(for instance an ejector plate and droplet generator plate coupled to anactuator), which generates a directed stream of droplets of fluid, and afluid supply arrangement for loading the ejector mechanism. For ease ofreference, the combination of the ejector mechanism and fluid supplyarrangement will be referred to herein as an ejector assembly. Suitablefluids include, without limitation, solutions, suspensions andemulsions, which have viscosities in a range capable of dropletformation using an ejector mechanism. Suitable fluids also include,without limitation, fluids containing pharmaceutical and medicamentproducts.

In order to achieve mass deposition of droplets of a fluid in highvolume droplet generation and ejection systems, continuous fluidejection via jetting may be utilized. Continuous jetting allows the massdeposition of larger volumes of fluid (for example, in the 0.5-30 uLrange) by the generation and ejection of large numbers of smalldroplets.

However, ejecting a stream of droplets in continuous mode may result inbeading due to chaotic jets, satellite droplet recapture, and inductiveand triboelectric charging effects, among others. Once formed, a fluidbead located over an ejector opening may grow, e.g., as a result ofpumping action, eventually wetting the exterior surface of the ejectoropenings, e.g., due to Coulomb attraction or mechanical motion. Inaddition to the momentum of the oscillating ejector mechanism, the fluiditself also adds to the momentum, which can build during continuousejection mode, or when an insufficient relaxation period is providedbetween periods of oscillation and ejection, as is discussed below.

As such, according to the disclosure, improved droplet generation andejection techniques are provided in order to drive the piezoelectricactuator (or other actuator) to reduce, minimize or eliminate fluidbeading on the ejector surface, and over the ejector openings. Thedisclosure also provides improved droplet generation and ejectiontechniques which suppress or prevent the formation of films ofincompletely ejected fluid on the surface of the ejection assembly, andon other components necessary to maintain performance over periods ofextended use.

Different techniques of stopping or reducing fluid momentum build-upduring continuous jet operation are disclosed, in order to suppress orprevent beading through electrical drive signal timing and piezoelectricenergy cancellation or active damping. These techniques are applicableto a range of suitable drive signal types, including, but not limitedto, sinusoidal, square, ramp, chirp, amplitude modulated and frequencymodulated drive signals and waveforms, and combinations of suchwaveforms.

In embodiments of these techniques, droplets may be formed from fluidcontained in a reservoir coupled to an ejector mechanism. The ejectormechanism and reservoir may be disposable or reusable, and thecomponents may be packaged in a housing of an ejector device, such asthose described in U.S. Provisional Application Nos. 61/569,739,61/636,559, 61/636,565, 61/636,568, 61/642,838, 61/642,867, 61/643,150and 61/584,060, and in U.S. patent application Ser. Nos. 13/184,446,13/184,468 and 13/184,484, the contents of which are incorporated hereinby reference.

Referring to FIG. 1, for example, the ejector assembly 100 may includean ejector mechanism 101 and reservoir 120. The ejector mechanism 101may include an oscillating plate arrangement with ejector plate 102integrally formed with a centrally located generator plate section thatincludes the ejector openings 126, as in this embodiment, or the ejectorplate 102 may be coupled to a separate generator plate, which can beactivated by the piezoelectric actuator 104 that forms part of theejector mechanism. For convenience, both embodiments will be referred toas having a droplet generator 132. The actuator 104 vibrates orotherwise displaces the ejector plate 102 to deliver fluid 110 from areservoir 120, either as a single droplet 112 (droplet on demand) fromone or more openings 126, or as a stream of droplets 112 ejected fromone or more openings 126, along a direction 114.

In some applications, ophthalmic fluid may be ejected toward an eye 116,for example of a human adult or child, or an animal. The fluid maycontain a pharmaceutical agent to treat a discomfort, condition, ordisease of the human or an animal, either in the eye or on skin surface,or in a nasal or pulmonary application.

The location of the attachment of the actuator 104 to the ejector plate102 may also affect operation of ejector assembly 100, and the creationof single droplets or streams thereof. In the implementation of FIG. 1,for example, the actuator 104 (or a number of individual actuatorcomponents 104) may be coupled to a peripheral region of the ejectorplate 102, on a surface 122 opposite the reservoir 120.

Central region 130 of the ejector plate 102, in this embodiment,includes an ejection region 132 with one or more openings 126, throughwhich fluid 110 passes to form droplets 112. Ejection region (or dropletgenerator) 132 may occupy a portion of the central region 130, forexample the center, or the ejection hole pattern of ejection region 132may occupy substantially the entire area of central region 130. Further,the open end 138 of the reservoir may correspond substantially to thesize of ejection region 132, or, as in this embodiment, the open region138 may be larger than the ejection region 132.

As shown in FIG. 1, ejector plate 102 is disposed over or in fluidcommunication with the open end 138 of the reservoir 120, containingfluid 110. For example, the reservoir 120 can be coupled to the ejectorplate 102 along a peripheral region 146 of the first major surface 125,using a suitable seal or coupling such as O-ring 148 a arranged in agroove formed in the reservoir wall 150. A portion 144 of reservoirhousing may also be provided in the form of a collapsible bladder.However, the disclosure is not so limited, and any suitable bladder orreservoir may be used.

When a voltage is applied across electrodes 106 a and 106 b on oppositesurfaces 136 and 134 of the actuator 104, ejector plate 102 deflects tochange to a relatively more concave shape 170 or a relatively moreconvex shape 172, as shown in FIGS. 2A and 2B, respectively depending onthe polarity of the voltage.

When driven with an alternating voltage, the actuator 104 operates toalternatingly reverse the convex and concave shapes 170 and 172 ofejector plate 102, inducing periodic movement (oscillation) of ejectorplate 102. Droplets 112 are formed at apertures or openings 126, asdescribed above, with the oscillatory motion of ejection region 132causing one or more droplets 112 to be ejected along fluid delivery(ejection) direction 114, for example in a single-droplet (droplet ondemand) application, or as a stream of droplets.

The drive voltage and frequency may be selected for improved performanceof the ejection mechanism, as described above. In some embodiments, theoscillation frequency of actuator 104 may be selected at or near aresonance frequency of the ejector plate 102, or at one or morefrequencies selected to oscillate ejector plate 102 at such a resonancevia superposition, interference, or resonant coupling.

When operated at or near resonant frequency, ejector plate 102 mayamplify the displacement of ejector region (droplet generator) 132,decreasing the relative power requirements of the actuator, as comparedto a direct-coupling design. The damping factor of the resonance system,including the actuator 104, ejector plate 102 and any fluid-filleddroplet generator, may also be selected to be greater than thepiezoelectric actuator input power, in order to reduce fatigue andincrease service life without substantial failure.

Examples of ejector assemblies are illustrated in U.S. ProvisionalPatent Application No. 61/569,739, “Ejector Mechanism, Ejector Device,and Methods of Use,” filed Dec. 12, 2011, which is incorporated byreference herein. In one particular embodiment, ejector plate mechanism100 may include a rotationally symmetric ejector plate 102 coupled to anannular actuator 104, for example as shown in FIG. 3A, and as describedin U.S. Provisional Patent Application No. 61/636,565, “Centro-SymmetricLead Free Ejector Mechanism, Ejector Device, and Methods of Use,” filedApr. 20, 2012, also incorporated by reference herein. However, thedisclosure is not so limited.

In the particular configuration of FIG. 3A, the ejector mechanism 300includes a separate generator plate 301 attached to an ejector plate302. The actuator 304 incorporates one or more individual piezoelectricdevices or other actuator elements, as described above, for driving therotationally symmetric ejector plate 302, but in this embodimentcomprises an annular structure. Drop generator (ejector) region 332 ofejector plate 302 includes a pattern of openings 326 in center region330, and is driven via the actuator 304 by means of a suitable drivesignal generator circuit as described below. Examples of techniques forgenerating drive voltages are illustrated in U.S. Provisional PatentApplication No. 61/647,359, “Methods, Drivers and Circuits for EjectorDevices and Systems,” filed May 15, 2012, as incorporated by referenceherein.

FIG. 3B is a dismantled view of the symmetric ejector mechanism 300. Inthis embodiment, the ejector plate 302 utilizes a discrete (separate)drop generator element (ejector region) 301, as shown on the left andright of FIG. 3B from the back (face down) surface 325 and front (faceup) surface 322, respectively. Drop generator element 301 ismechanically coupled to ejector plate 302 over central aperture 352, andincludes a pattern of openings 326 configured to generate a stream offluid droplets when driven by generator-plate type actuator 304, asdescribed above.

FIG. 3C is a plan view of a symmetric ejector mechanism 300. Ejectormechanism 300 includes ejector plate 302, to which is attached actuator304 and droplet generator 301. The droplet generator includes a patternof openings 326 in central region 330, as described above. The ejectormechanism 300 may be coupled to a fluid reservoir or other ejectiondevice component via apertures 351 in symmetrically arranged tab-typemechanical coupling elements 355, or using another suitable connectionas described above with respect to FIG. 1.

As shown in FIG. 3C, the ejector plate 302 may have a dimension 354 ofabout 21 mm, or in a range of about 10 mm or less to about 25 mm ormore, depending upon application. Suitable materials for ejector plate302 and drop generator 301 include, but are not limited to, flexiblestress and fatigue-resistant metals such as stainless steel.

For orientation purposes, the different elements of ejector mechanism300 as shown in FIGS. 3A-3C may be described relative to the location ofthe reservoir such as reservoir 320 described above with respect toFIG. 1. In general, the proximal elements of mechanism 300 are locatedcloser to fluid reservoir 120 (FIG. 1) and the distal elements arelocated farther from fluid reservoir 120, as defined along the dropletstream or ejection direction 114.

In the particular embodiment of FIG. 4, the ejector assembly 400includes an ejector mechanism 400 that comprises oscillating ejectorplate 402 with first major (proximal) surface 425 adjacent fluidreservoir 420, and second major (distal) surface 422 opposite fluidreservoir 420. Piezoelectric actuator 404, in this embodiment, is formedas a distal element, with reservoir 420 attached to the proximal surface425 of oscillating plate 402. Alternatively, actuator 404 may be coupledto ejector plate 402 on the distal surface 425 around the reservoir 420.

Proximal and distal surfaces 436 and 434 of actuator 404 are providedwith conducting layers 460, for example to provide bottom and topelectrodes 106 a and 106 b (FIG. 1) for drive signals, as describedabove. As shown in FIG. 4, conducting layer 460 on proximal surface 436of actuator 404 is separated from distal surface or side 422 of ejectorplate 402 by a dielectric layer 462, allowing the oscillating ejectorplate 402 to be grounded and electrically isolated from conducting layer460 of actuator 404. On the distal side 434 of the actuator, anadditional dielectric layer 462 may be provided to space a metallizationlayer 461 from the top conducting layer (or drive electrode) 460. Thiselectrically isolates metallization layer 461 allowing the metallizationlayer to serve as an electrically isolated electrode for back EMF(electromotive force) measurements in certain embodiments of thedisclosure. In other embodiments separate contacts for back EMFmeasurements may be eliminated by using the voltage levels on theelectrodes 106 a, 106 b as is discussed further below.

As shown in FIG. 4, oscillating ejector plate 402 is positioned in fluidcommunication with reservoir 420, and proximal surface or side 425 is incontact with fluid 410. An additional coating layer 463 may be formedover the exposed (top and side) surfaces of actuator 404, and mayinclude at least part of distal surface 422 of ejector plate 402, inorder to prevent contact between the actuator 404 and any fluid 410ejected from reservoir 420. In some implementations, one or both ofejector plate 402 and generator plate (or ejector region) 432 may alsobe coated with an inert, medical grade, non-toxic, non-reactive, andoptionally acid-, base-, and solvent-resistant material 465, or anothermaterial having a suitable combination of such properties.

Coatings 463 and 465 may be the same or different, and appliedindividually or in any combination, for example by sputtering, vapordeposition, physical vapor deposition (PAD), chemical vapor deposition(COD), electrostatic powder deposition, or any suitable combination ofsuch techniques. Coatings 463 and 465 may include polymer materials suchas polypropylene, nylon, and high density polyethylene (HDPE), TEFLON®material and other conformal coatings, and metal coating materialsincluding, but not limited to, gold, platinum, and palladium. Coatings463 and 465 may be selected to adhere sufficiently to preventdelamination when vibrating at a high frequency, as applied to anycombination of surfaces of oscillating ejector plate 402, generatorplate 432 and actuator 404, either individually or together, in athickness range of about 0.1 μm or less to about 500 μm or more.

In order to drive the actuator of the piezoelectric mechanism, a drivesignal or drive waveform needs to be generated by a driver circuit. Inproviding such a drive signal, a number of factors were considered inaccordance with the present disclosure. In particular, a variety offactors can affect the velocity of the displaced mechanical load,including the drive signal frequency and amplitude as well as thequality factor of the mechanical resonance at said frequency. As thedrive signal frequency, amplitude, or both are increased, thedisplacement velocity of the mechanical load increases. However, higheroperating frequencies, while increasing displacement velocity, also havea higher average power. The additional power required to operate at highfrequencies may not be desirable in certain applications. Piezoelectricmaterials and piezoelectric driven devices exhibit resonance regionswhere mechanical actuation becomes maximized. It is often desirable toprovide an electrical actuation signal at these frequencies to causemaximum displacement of the piezoelectric element or piezoelectricmechanism (e.g., the piezoelectric element coupled to a load such as anejector plate and fluid filled generator plate) using the least amountof electrical energy possible. However, at resonance, piezoelectricdevices become either fully or partially resistive, dissipating a largeamount of energy in the piezoelectric. They also lose the beneficialenergy dissipation properties of capacitive mode operation and reducetheir efficiency in resonant converter circuits. Thus, there remains aneed for improved apparatuses, methods and systems, as described herein,which provide maximum displacement and displacement velocity ofmechanical loads coupled to piezoelectric actuators, whilesimultaneously enhancing the energy efficiency of the system. This isparticularly important in battery operated systems in which theavailable power may be limited. According to the invention, the fluidfilled ejector mechanism is treated as a membrane with a membrane modeof vibration different from the piezo itself. While resonance of thepiezo is the frequency with the highest movement/mechanical drive powerof the ceramic itself, there are membrane modes which are not based onthe ceramic/piezo resonance itself. The piezo simply generates theforcing function, and the lower the loss in the membrane the higher themovement. When the system is driven in one of these membrane modes thepiezo can be nearly a perfect capacitor allowing high Q amplification ofan input voltage or current with the piezo as the capacitor. Thisgreatly reduces energy consumption and allows delivery of a much highervoltage and current to the device, without heating the piezoelectric.

In addition, a variety of factors can change the resonant properties andelectrical characteristics of piezoelectric devices, such as the drivesignal applied to the piezoelectric, the mechanical load coupled to thepiezoelectric, or even the ambient temperature, pressure and humiditysurrounding the piezoelectric. A piezoelectric originally driven tooperate at a resonant frequency may drift out of resonance because ofone or more of these factors, which cause less efficient operation ofthe piezoelectric, and potentially reduced displacement of themechanical load. Thus, there remains a need for apparatuses, methods andsystems, as described herein, which can detect the resonances ofelectromechanical systems comprising piezoelectric actuators and theirassociated mechanical loads, and when these systems are no longeroperating in a resonance mode, to provide corrective action to bring thepiezoelectric actuator and/or the mechanical load back into resonance.

According to the present disclosure, there is provided a method andcircuit to track maximum displacement, or resonant modes, in order tocompensate for temperature, humidity, and pressure variations, andmanufacturing tolerances. Furthermore, tracking of resonances withoutthe use of an isolated feedback electrode is described herein, using theactuator electrodes as part of the feedback portion of the resonantsystem. By eliminating the separate isolated feedback electrodes sprayis appreciably increased by 10-50% depending on the device. In oneembodiment, this technique is used with a full bridge circuit and a Qfactor sweep with resonant converter circuits as is discussed in greaterdetail below.

In certain embodiments of the disclosure, means are provided forexciting, detecting, and characterizing an electrical and/or mechanicalresonance of a piezoelectric element or several coupled elements, or ofan ejector mechanism. When an electromechanical mechanism such as anejector mechanism becomes resonant, energy is stored in theelectromechanical mechanism and released at a different rate than in anon-resonant electromechanical, electrical, or mechanical mechanism.Furthermore, the resonance of the electromechanical mechanism will actas an integrator of electrical signals in time, allowing a number ofunique signatures to be generated depending on the electrical signalapplied.

In certain embodiments, an electrical signal, which could be a singletone, multi-tone, chirp, arbitrary waveform, or any electrical signalcontaining one or more frequencies is applied to a piezoelectricelement. The circuit generating the electrical signal can be any circuitthat delivers electrical power, or voltage and current, at the intendedelectrical signal frequency(s). The electrical signal is applied for adefined amount of time and then stopped suddenly. The electrical signalremaining in the piezoelectric is then measured by either current,voltage, or power measurement and either recorded for mathematicalprocessing such as by way of an FFT (Fourier Transform) or applieddirectly to an analog energy integration circuit. The analog integratorcan be switched on and off to correlate against a defined waveform orcan simply integrate all energy stored in the ejector. Signatures of theelectromechanical resonance are obtained which are dependent on theoriginal electrical signal and the mechanical and electrical propertiesof the electromechanical system. [00106] Furthermore, and particularlywith respect to droplet ejector systems, in order to generate dropletsof the appropriate size and having sufficient ejection velocity, thedrive signal to the piezoelectric must be sizeable. Batteries, whichcould be conveniently attached to a droplet generator ejection system,do not produce sufficient voltage to drive the piezoelectric. Thus,there remains a need for systems, methods and apparatuses for poweringdroplet generation ejection systems while maintaining the ease andportability of battery packs.

FIG. 5 shows one embodiment of a system 500 for use of a piezoelectricactuator 540, e.g., as might be used in a droplet generator system. Asshown on FIG. 5, the system 500 may comprise a power source 510, such asa battery; an electronic driver 520, i.e., the circuitry responsible forgenerating the drive voltage or signal 530 to a piezoelectric actuator540; the piezoelectric actuator 540; and the mechanical load 550 towhich the piezoelectric actuator 540 is coupled. The piezoelectricactuator 540 may be used to drive a variety of mechanical loads 550,such as a droplet generator plate to form fluid droplets as described inU.S. Provisional Application Nos. 61/569,739, 61/636,559, 61/636,565,61/636,568, 61/642,838, 61/642,867, 61/643,150 and 61/584,060, and inU.S. patent application Ser. Nos. 13/184,446, 13/184,468 and 13/184,484,the contents of which are incorporated herein by reference, and asdescribed above.

In certain embodiments, as shown on FIG. 5, it may also be desirable tocouple a resonance detection and control circuit 560 to thepiezoelectric actuator 540. This circuit 560 can be used to detect whenthe entire electromechanical mechanism 570 (actuator 540 and load 550)is no longer operating in a resonance mode, i.e., the mode in which themechanism 570 produces the greatest or increased mechanical displacementof the load 550. The circuit 560 may also provide feedback to the driver520 to control the frequency, for instance to bring it back to resonantfrequency. Other embodiments of power sources, drivers, converters andwaveforms in accordance with the disclosure are presented in theincorporated references.

As is discussed in further detail below, in one embodiment, a fullbridge circuit is used to drive the piezoelectric ejector mechanism. Thepotential (voltage) on each side of the piezoelectric element isalternated between the power supply voltage, which may be the output ofa boost converter, resonant converter, buck-boost converter,transformer, or voltage converter, and ground to allow portableoperation at a given frequency. By driving the piezoelectric for aslittle as a cycle at a single frequency, energy is stored in thepiezoelectric ejector mechanism which is released back into the circuitin the form of a voltage if the drive signal is stopped.

Thus, when the drive signal is halted, the piezoelectric operatesdominantly as a signal source rather than a load. The energy of theelectromechanical mechanism (ejector mechanism with its piezoelectricelement) must go either back into the electrical circuitry as a voltageor be dissipated through friction and electrical loss in the mechanicalsystem.

Three cases exist which determine how the electromechanical energy isremoved and or dissipated. If the circuit attached to the ejector isopen (tri-stated), the piezoelectric will trade energy throughoscillation with driver FET capacitances or simply dissipate throughmechanical loss and internal electrical loss. The circuit connected tothe ejector could also be shorted, which causes the ejector to quicklydump its energy into the system ground. Instead, the circuit couldpresent a finite electrical load to the ejector, which causes acontrolled evanescent oscillation.

In the open and finite load cases, sampling the output voltage of theejector provides a measure of the ejector mechanism movement, which iscorrelated to fluid ejection. Current sampling can be used in the caseof a short to provide movement tracking. No feedback electrode isrequired in any of these cases, thereby avoiding having to provide aseparate metallization layer such as the layer 461 in the FIG. 4embodiment.

Power source 510 may be any suitable power source, including a suitablebattery, capable of powering the driver 520. Although not shown, system500 may include more than one power source, or an alternative, orback-up, power source, if desired. Depending on the characteristics ofthe power source 510, it may be necessary to boost the output voltage ofthe power source 510 in order to ultimately power the piezoelectricactuator 540.

As discussed above, in some embodiments according to the presentdisclosure, the output voltage from power source 510 may be boosted,e.g., by a boost converter or a buck-boost converter with apiezoelectric actuator 540 as a load. One embodiment of a modifiedbuck-boost converter of the disclosure is shown in FIG. 6.

This converts DC-AC rather than DC-DC. It serves to dump charge onto acapacitor (defined by the piezoelectric actuator 600) then takes allthat charge and funnels it back into the battery 602. Fast recoverydiodes D1, D3 may be included to prevent body diode failure. The drivermay include a P-MOSFET T1 connected in series with an inductor L1 frompower input to ground, a piezoelectric connected between the seriesconnection of the inductor L1 and P-MOS T1 and an N-MOS T2 connected toground. The N-MOS T2 should have a fast recovery diode D1 to preventbody-diode failure. When the P-MOSFET T1 switches off, current continuesto flow through the inductor L1 so output voltage above the N-MOSFET T2drops negative and current conducts through the diode D1 in parallelwith the N-MOSFET. All of the current deposits onto the piezoelectricand the voltage over the piezoelectric goes from zero to a valuedetermined by the current ramping through the inductor L1. The voltagemay be calculated based on the charge contained by the current in theinductor L1 according to the equation: V=Q/C, where Q is the charge andC is the capacitance (V is voltage). In one embodiment, at the end ofthe cycle, the N-MOSFET D2 may be switched on to take the piezoelectricvoltage back to ground. This cycle may be repeated at the intended drivefrequency. The circuit with its buck-boost converter may be moreefficient (50% less current use or better) as compared to boostconverters while producing an equivalent voltage. This takessubstantially less current for the same drive voltage. However, adrawback with the use of this configuration is that it is limited toabout an 80-100 Volt amplitude signal due to the drain to source voltageVds limits of the FETs.

In another embodiment a modified boost converter (shown in FIG. 7) usedwith a full bridge (discussed further below with respect to FIG. 15) anddriving a resonant converter (shown in FIG. 8) was used to increasesignal amplitude and provide desired overshoot capabilities (i.e.,100-170 Volts). The embodiment of a resonant converter shown in FIG. 8includes one or more inductors 800. The inductors are added to create aresonant converter for increased voltage amplification over thepiezoelectric actuator (depicted by the capacitor 802), which functionsas the load. Thus in this embodiment a full bridge is used to drive aresonant tank, which functions as a resonant converter without the finalDC portion in a DC-AC-DC transition.

One embodiment of a driver circuit making use of a boost converter isshown in FIG. 9. Like elements will be referred to using the samereference numerals in the various embodiments discussed below. As shownin the embodiment of FIG. 9, the power source 510 may be coupled to aboost converter 900, which, in turn, includes or is coupled to acharge-holding capacitor 910. The boost converter 900 may be used tostep up the supply voltage from the power source 510 and to charge thecapacitor 910 in order to supply the charge and voltage necessary todrive the piezoelectric actuator 540. The boost converter 900 changesvoltage to allow the correct E-field to be applied to piezoelectricactuator 540, thus, voltage rather than power may be boosted. By way ofnon-limiting example, a power supply 510 may supply 2.7 V to the boostconverter 900, providing a capacitor 910 output voltage of up to 60 V.Other embodiments of power sources in accordance with the disclosure arepresented herein. A feedback signal 580 is used by a resonance detectionand control circuit 560 to determine resonance frequencies andoptionally to provide feedback to control the frequencies provided bythe driver 520.

Driver 520 according to the present disclosure may generally beconfigured to produce and control the drive signal 530 to thepiezoelectric actuator 540. Additional embodiments of drivers 520according to the present disclosure are discussed below. Depending onthe desired characteristics of the overall mechanism 570, the driver 520may be operated in any of several different modes. For example, incertain embodiments, drivers 520 as described herein may be configuredto create multi-tone drive signals 530 which operate (1) at two or morefrequencies outside mechanical/electrical resonances where the beatfrequencies are at mechanical resonances, as described in further detailbelow in the section titled “Envelope Mode”, or (2) at two or morefrequencies of separate mechanical resonances, as described in furtherdetail below in the section entitled “Bessel Mode”. It will, of course,be understood that these drivers may also be configured to drive asingle frequency, such as a single resonant frequency. The drivers mayalso provide square waves to drive a single mode or multiple modes withsquare wave harmonics to induce increased mechanism velocity. Specificimplementations are now discussed.

In one embodiment, it may be desirable to drive the piezoelectricactuator 540 so as to increase the displacement of the mechanical load550, while simultaneously preserving the capacitive effect of thepiezoelectric actuator 540 and minimizing overall power consumption. Inone embodiment, a driver may operate in an “envelope mode”. In such anembodiment, the driver 520 may be configured so as to operate at two ormore frequencies outside mechanical/electrical resonances where the beatfrequencies are at mechanical resonances.

As described previously, in certain implementations, piezoelectricactuators may be driven in resonance to provide maximum displacement ofthe mechanical load. Thus, the drive signal 530 may be based on integermultiples of a resonant frequency, i.e., the piezoelectric actuator 540may be driven harmonically. However, without being limited by theory, itwill be understood by those skilled in the art that signals havinghigher fundamental operating frequencies may result in increasedelectrical power consumption, since as the impedance of the load changeswith frequency, certain higher operating frequencies may have the effectthat the piezoelectric actuator behaves more like a resistor than acapacitor. In certain embodiments of the disclosure, the driver 520 mayalternatively combine two or more signals to drive the piezoelectricactuator 540. The frequencies and amplitudes of the input signals may beselected so as to produce increased displacement of the mechanical load,while simultaneously preserving beneficial energy and circuit benefits,such as nearly ideal capacitive behavior. Signal characteristicsselection may depend, for example, on the desired displacement of themechanical load.

In general, as shown on FIG. 10, driver 520 according to the currentdisclosure may comprise two or more input signals 1010 a, 1010 b, 1010c, etc., coupled to a combining circuit 1020. The combining circuit 1020may be any form of electronics suitable for combining two or moreelectric signals into a combined two-tone or multi-tone drive signal530, e.g., electronics suitable for producing the sum and/or thedifference of all or a subset of the input signals 1010 a, 1010 b, 1010c, etc. The combined drive signal 530 may be coupled directly to thepiezoelectric actuator 540, or, optionally, coupled to an impedancematching circuit (not shown) which is then coupled to the piezoelectricactuator 540. This allows for impedance matching (i.e., of thepiezoelectric actuator 540 to the output impedance of the drivercircuit).

The frequencies of the input signals 1010 a, 1010 b, 1010 c, etc., maybe selected so as to optimize certain characteristics of the system. Forexample, by driving the piezoelectric actuator 540 with two (or more)non-resonant frequencies, energy dissipation in the piezoelectricactuator 540 can be minimized. In one particular embodiment, it may bedesirable to indirectly drive the piezoelectric actuator 540 intoresonance by selecting the input signals 1010 a, 1010 b, 1010 c, etc.,such that the difference or sum of the two or more frequencies, i.e.,the frequencies of the one or more combined drive signals 530, equal oneor more resonant frequencies of the piezoelectric actuator 540. Withoutbeing limited by theory, it will be understood that when two or moreelectric signals having different frequencies are combined, they willperiodically constructively and destructively interfere at difference,sum, and cross-modulation frequencies.

This property of interference can be exploited, in combination withamplitude and phase-weighting, such that that the resulting constructiveand destructive interference occurs to provide one or more resonantfrequencies of the piezoelectric actuator 540 and result in maximumphysical displacement x of the load 550. In this manner, the driver 520may indirectly cause resonant mechanical motion in the piezoelectricactuator 540. FIG. 11 shows the time-varying voltage output 530 of oneexample of a two-tone driver 520. In one embodiment, the two or moreinput signals 1010 a, 1010 b, 1010 c, etc., (each having non-resonantfrequencies) could be driven at the same combined maximum amplitude as asingle-mode drive. This may result in decreased electrical powerconsumption as compared to the single-mode drive, because the individualsignals are at lower frequencies than the resonant frequency. Thus thepiezoelectric material benefits from the combined higher frequency sincea piezoelectric material has higher impedance at lower frequencies thanat the resonant frequency.

Furthermore, by driving the piezoelectric actuator 540 with two or morenon-resonant frequencies, the electrical properties of the piezoelectricactuator 540 can be kept completely capacitive while still resulting inmechanical resonance and increased displacement. This allows thepiezoelectric actuator 540 to be used directly in resonant converters,further reducing energy losses in the piezoelectric actuator 540 byrecapturing the energy in one or more inductors.

Drivers operating in an “envelope mode” according to the embodiments ofthe present disclosure may improve droplet ejection and lower powerconsumption in piezoelectric droplet ejector systems. They mayadditionally extend the range of fluid viscosities which can be ejectedfrom a droplet ejector system. Exemplary operating frequencies in suchapplications may range from 1 KHz to 5 MHz, such as, for example, 43 kHzand 175 kHz. Using drivers as described herein, the system can supportmultiple high-displacement frequencies which reduce fluid beading andincrease the range of viscosities the system can eject.

In another embodiment, a driver according to the present disclosure mayoperate in a “Bessel mode”. Driver 120 may be configured to operate attwo or more frequencies of separate mechanical resonances.

Similar to the operation mode described above, and as shown on FIG. 10,a driver 520 according to the current disclosure may comprise two ormore input signals 1010 a, 1010 b, 1010 c, etc., coupled to a combiningcircuit 1020. The combining circuit 1020 may be any form of electronicssuitable for combining two or more electric signals into a combinedtwo-tone or multi-tone drive signal 530, e.g., electronics suitable forproducing the sum and/or the difference of all or a subset of the inputsignals 1010 a, 1010 b, 1010 c, etc. The combined drive signal 530 maybe coupled directly to the piezoelectric actuator 540, or, optionally,coupled to an impedance matching circuit (not shown) which is thencoupled to the piezoelectric actuator 540. This allows for matching theimpedance of the load (i.e., the piezoelectric actuator 540) to theimpedance of the driver circuit 520. In order to determine resonance, afeedback signal 580 is used by a resonance detection and control circuit560 to determine resonance frequencies and optionally to providefeedback to control the frequencies provided by the driver 520.

In embodiments where driver 520 operates in a Bessel mode, thefrequencies of the input signals 1010 a, 1010 b, 1010 c, etc., differfrom those described above for the envelope mode, such that differentcharacteristics of the system are optimized. In envelope modeimplementations, the input signals 1010 a, 1010 b, 1010 c, etc., arespecifically selected at non-resonant frequencies which will combine toproduce resonant beat frequencies as shown in FIG. 11. In Bessel modeembodiments, for reasons which are described in further detail below,the input signals 1010 a, 1010 b, 1010 c, etc., themselves are atdistinct resonance frequencies of the piezoelectric actuator 540 andmechanical load 550. Furthermore, drivers operating in a Bessel mode areoptimized to work specifically with non-rectangular loads 550.

Without being limited by theory, it is generally understood thatresonance modes of an electromechanical system are assumed to be integermultiples of the resonant frequency, i.e., at harmonics. However, wheneither the mechanical load 550 or the piezoelectric actuator 540 itselfis non-rectangular, the eigenmodes of the ejector mechanism, i.e., thefrequencies at which the entire mechanism vibrates simultaneously, donot occur at integer multiples that can be easily generated usingharmonic electrical signals 530. This prevents optimum drive ofpiezoelectric actuator 540 and mechanical load 550 for shapes that arenot rectangular. Rather, for circular, or roughly circular, mechanicalloads 550, the resonance frequencies occur at Bessel frequencies, i.e.,a resonant frequency multiplied by the solutions of the Bessel function.Thus, for embodiments operating in a Bessel mode, the driver 520 may beoptimized to provide maximum displacement of circular, or roughlycircular, mechanical loads 550, by using two or more input signals 1010a, 1010 b, 1010 c, etc., having Bessel frequencies.

In certain embodiments, the amplitudes and frequencies of the inputsignals 1010 a, 1010 b, 1010 c, etc., may be selected such that thesystem 500 provides improved displacement of the mechanical load 550 atthe lower resonant frequency and improved displacement velocity of themechanical load 550 at the higher resonant frequency. For example, indroplet generator applications, Bessel mode input signals 1010 a, 1010b, 1010 c, etc., can be driven with amplitude weighting among distincteigenmodes with desirable shape factors to optimize both mechanicaldisplacement of liquid medication and the velocity of dropletdisplacement while maintaining an optimum phasing relationship to theelectrical drive signal 520 in order to facilitate maximize fluidejection. By combining two (or more) input signals 1010 a, 1010 b, 1010c, etc., selected in this manner, the overall quality of the system maybe enhanced—the lower frequency mode can enhance the higher frequencymode—and the overall power in each signal can be reduced as compared toa single-mode signal.

By way of example only, a droplet ejector mechanism may have Besselresonance modes at 50 kHz and 165 kHz. Driving at 50 kHz alone provides5 μm of displacement; driving at 165 kHz alone provides 800 nm ofdisplacement of the ejector mechanism, but also provides higher velocityand improved spray characteristics. However, in a system according tothe present disclosure, both modes may be driven simultaneously. Runningboth signals at half-power provides both 2.5 μm of displacement from the50 kHz mode and another 400 nm of displacement from the 165 kHz mode,for a total of 2.9 μm—significantly higher than the 800 nm the 165 kHzsignal alone could provide—but with the improved displacement velocityand spray characteristics associated with the 165 kHz signal. Inaddition, spray is boosted periodically at the beat frequencies, 215 kHz(i.e., the sum of the signals) and 115 kHz (i.e., the difference of thesignals). This increases the peak velocity of the system and the rangeof viscosities the droplet ejector mechanism can eject while suppressingfluid beading.

One having ordinary skill in the art will understand that this is butone example of a combination of modes, and that many other modes ofoperation could be selected to satisfy differing system requirements.Each bessel mode (different frequency) has a certain velocity anddisplacement. Thus lower frequency modes have lower velocity, but mayhave a higher displacement.

According to the present disclosure, the spray is due to a combinationof displacement and frequency (velocity). Both aspects can be augmentedby using multiple frequencies. In one embodiment, for example, byreducing the amplitude of each electrical drive frequency by one half,the total displacement seen with a droplet ejector mechanism operatingat 391 kHz can be increased by over 1700 nm due to the lower-frequency,higher-displacement low-spray mode, while maintaining the correctelectrical and mechanical phasing for resonant ejection. In addition,the amount of energy required to power high-viscosity fluid ejection islowered as compared to the use of single-mode drivers.

As shown, with respect to FIG. 10, drivers operating in both envelopemode and Bessel mode, as described herein, may be implemented using thesame logical and electronic components. As described above, theoperation of system 500—i.e., in envelope mode or Bessel mode—is afunction of the frequencies and amplitudes of the signals applied to thecircuitry, as well as the mechanical resonance quality factor.

Other embodiments of the driver are discussed below. In the embodimentof FIG. 12 a driver 520 provides electrical signals 1210 a, 1210 b bymeans of electrical alternating current (AC) sources 1200 a, 1200 bwhich are then summed by a frequency mixer 1220. These AC sources may beselected so as to generate each signal 1210 a, 1210 b with the desiredfrequency and amplitude. In one embodiment, the combined signal 1220 maybe coupled to an amplifier 1230, which may be powered by the powersource 510, or alternatively by a separate power source 1240, which maybe coupled to a power converter 1250 such as an AC/DC converter or aDC/DC converter in the event that a large output voltage, current, orpower is needed for actuation of the piezoelectric actuator 540. Such anamplifier 1230 may be linear or nonlinear and can be single-ended ordifferential. A feedback signal 580 is used by a resonance detection andcontrol circuit 560 to determine resonance frequencies and optionally toprovide feedback to control the frequencies provided by the AC sources1200 a, 1200 b.

FIG. 13 shows another implementation of a driver 520 according to thecurrent disclosure. In this embodiment, the driver 520 may comprise oneor more electrical sources or numerically controlled oscillators (NCOs)1300, 1302 with distinct frequencies 410 a, 410 b. The signals 1310 a,1310 b generated by these sources 1300, 1302 can then be summeddigitally in an OR gate or other digital logic 1320 to create amulti-frequency signal similar to performing a pulse-width modulation(PWM). Then, as shown in FIG. 13, the resultant signal 1330 may be usedto drive a half-bridge circuit 1340 to generate a single-ended drivesignal 130 across the piezoelectric 150. The bridge circuit 1340 may befed from the power source 110 or a separate power source 1342,optionally via a power converter 1350. A feedback signal 580 is used bya resonance detection and control circuit 560 to determine resonancefrequencies and optionally to provide feedback to control thefrequencies provided by the NCOs 1300, 1302.

In another embodiment, shown in FIG. 14, the driver 520 may againcomprise one or more electrical sources or numerically controlledoscillators (NCOs) 1400, 1402 with distinct frequencies 1410 a, 1410 b.The signals 1410 a, 1410 b generated by these sources 1400, 1402 can besummed digitally in an OR gate or other digital logic 1420 to create amulti-frequency pulse-width modulated (PWM) signal. Then, as shown inFIG. 14, the resultant signal 1430 may be used to drive two half-bridgecircuits 1440 a and 1440 b, the half-bridge circuit 1440 b being fed viaan inverter 1480 to provide an anti-phase version of the output 1430, inorder to form a full-bridge drive. The bridge circuits 1440 a, 1440 bmay be fed from the power source 110 or a separate power source 1442,optionally via a power converter 1450. A feedback signal 580 is used bya resonance detection and control circuit 560 to determine resonancefrequencies and optionally to provide feedback to control thefrequencies provided by the NCOs 1400, 1402.

One having ordinary skill in the art will understand that two separatesources and appropriate logic may be used to control the phasing anddead time between half-bridge drives. FIG. 15 shows one embodiment of acircuit diagram implementing such a full-bridge drive 1501, whereinmultiplexers 1590 a, 1590 b receive additional non-inverted control lineinputs 1592 a, 1592 b, respectively, and inverted control lines 1594 a,1594 b, respectively from the NCO's. The multiplexers 1592 a, 1592 ballow either a mixed two frequency signal to drive a full bridge, orseparate frequencies to drive each half of a full bridge. The controllines allow different modes of operation, e.g., using a single NCO andinverter to drive both halves of a full bridge at a single frequency, orusing two NCO's in the shown configuration at the same frequency but inanti-phase. FIG. 16 shows yet another embodiment of a driver 520according to the current disclosure. In this embodiment, the driver 520comprises a waveform database 1600 for example incorporating a digitalrepresentation of a drive signal 530. The waveform database 1600 may beutilized to generate an arbitrary single-tone or multi-tone digitalwaveform signal for a digital-to-analog converter (DAC) 1610 forconversion into a corresponding electrical signal 1620. This signal 1620may be boosted by an appropriately powered amplifier 1630 (powered bythe power supply 510 or by a separate power supply 1640, as shown onFIG. 16). The amplifier 1630 may be linear or nonlinear, and can besingle-ended or differential. The resultant drive signal 530 is thenapplied to a piezoelectric actuator 540 in order to drive a mechanicalload 550, for example a fluid-loaded ejector plate or an ejector platewith fluid-filled droplet generator. Feedback signal 580 is used by aresonance detection and control circuit 560 to determine resonancefrequencies and optionally to provide feedback to control the selectionof frequency(s) provided by the database 1600.

FIG. 17 shows a circuit diagram of one embodiment of a driver 120circuit according to the current disclosure providing a full bridgedriver and resonance measurement circuit. In this embodiment, the driver120 comprises a first PMOS/NMOS pair 1800,1802, which switches apositive voltage, Vboost, between the electrodes of a piezoelectricactuator (ejector) at the system drive frequency using the drive signal1804 and inverted drive signal 1806. The first PMOS/NMOS pair 1800/1802drives a first or positive side of the actuator by means of signal 1810.The drive frequency may range, e.g., from 1 Hz to 10 MHz, and the Vboostvoltage may range, e.g., from 6 Volts to 75 Volts. The voltage on theoutput 1810 is controlled by means of a transistor 1812, which iscontrolled by a Time-Energy-Product (TEP) feedback signal 1814, as partof a TEP measurement circuit that is shown in enlarged view in FIG. 18.This allows for the signal from the driver to be de-coupled for purposesof monitoring the output signal from the piezoelectric actuator as isdiscussed in more detail below.

The driver further includes a second PMOS/NMOS pair 1814, 1816 to drivea second or negative side of the actuator by means of a signal 1820. Thedrive voltage 1820 to the driver is controlled by turning off transistor1822. During monitoring of the output voltage from the piezoelectricactuator, the transistor 1822 is briefly turned on to prevent drivervoltage from passing through to the ADC (not shown but its location isindicated by reference numeral 1850). As is discussed in greater detailbelow, the transistor 1822 is then turned off and transistor 1824 isturned off by TEP enable signal 1832, to allow the output voltage topass through to the ADC (not shown). Transistor 1824 can also be drivenat the original signal drive frequency via the TEP enable signal 1832 toprovide a correlated output signal.

FIG. 18 shows the voltage control circuitry of FIG. 17 in an enlargedview The circuit is differentially balanced by providing equalresistances R1 and R2. The TEP_enable 1832 keeps the T7 transistor 1824on during drive. This keeps the 45 V+ from reaching the ADC, which has amaximum input of VDD<=6V. Resistor R2 and capacitor C1 form anintegrator circuit to measure ejector ringdown.

The signals TEP_n 1814 and TEP_p 1830 short the signals Ejector p 1810and Ejector n 1820, respectively for a brief period of time after thedrive is cut off to drain the voltage to a low enough level to avoidblowing up the ADC. Thereafter, the TEP_n 1814 remains on connectingEjector_p 1810 through transistor T5 1812 to ground. The signal TEP_p1830 cuts off transistor T6 1822, switching Ejector_n into the ADC portpath. The TEP_enable 1832 either disables transistor T7 1824 or drivesit at the original drive frequency for correlation. The RC integrator infront of the ADC simply integrates the output signal and the ADC samplesat a specified time to get a value for the amplitude of the energy inthe TEP signal.

Regardless of the amplitude and/or frequency of the drive signal 130,when the piezoelectric actuator 540 is driven by a drive signal 530,some amount of energy will be both stored and released in theelectromechanical mechanism 500. That said, the question of how muchenergy is stored and dissipated in the piezoelectric actuator 540 is afunction of, among other things, the frequency of the drive signal 530,the ambient temperature, and the nature of the mechanical load 550. Asdescribed previously, piezoelectric actuators are often driven inresonance modes to provide increased or maximum displacement of themechanical load. At the resonant frequency of the piezoelectric actuator540, energy is stored and released at a different rate than when thepiezoelectric is in a non-resonant mode. When the mechanism is inresonance, energy will remain in the mechanism and ring in thepiezoelectric for some (measurable) period of time before it eventuallydecays and the mechanism returns to its initial resting state. When themechanism is not in resonance, energy drains from the mechanism may bealmost immediate. For example, FIG. 19 shows the time-varying voltage ofone embodiment of a system according to the current disclosure, duringthis decay period in both resonant and non-resonant modes. It ispossible to exploit this characteristic of electromechanical systems todetermine when the mechanism is in resonance and when it is not.

FIGS. 20 and 21 show examples of methods of the disclosure forgenerating energy profiles of the mechanism 500, which can be used fordetermining whether or not the mechanism is in resonance. Similar stepsin the flow charts are depicted by the same reference numerals forpurposes of simplicity. As shown on FIG. 20, at step 2000 a drive signal530 may be applied to the piezoelectric actuator 540 for a finite periodof time. Depending on the overall mechanism requirements and the type ofcharacteristics to be detected, the piezoelectric actuator 540 may ormay not be coupled to a mechanical load (not pictured). Generallyspeaking, the drive signal 530 should be applied to the piezoelectricactuator 540 for at least one period of the waveform for piezoelectricmodes (where the piezoelectric actuator is not coupled to a load) andtwo periods of the waveform for membrane modes (where the piezoelectricactuator is coupled to a load such as a fluid filled ejector mechanism),regardless of frequency, to obtain a detectable signal. The energy inthe load builds for a period of time dictated by the quality factor ofthe resonance, and can be driven for any amount of time greater than theminimum number of periods required.

At step 2010, the signal 530 is no longer applied to the piezoelectricactuator 540. This “stop” may be caused by simply powering off thedriver 520, disconnecting the driver 520 (e.g., electrically, bytri-stating drive FETs), or some other action sufficient to prevent thesignal 530 from being applied to the piezoelectric actuator 540. At thispoint, the mechanism 570 will revert to its initial resting state, i.e.,the piezoelectric actuator 540 will no longer be actuated to displace amechanical load 550, and the energy remaining in the mechanism willdissipate. How quickly the signal 580 decays will, as discussedpreviously, depend on whether the mechanism is in resonance. To make thesignal 580 more easily detectible, it may be desirable to increase theamplitude of the signal 580 by stopping the drive waveform at a peak ofthe drive signal 530 rather than at a zero crossing. It is noted,however, that stopping the drive signal 530 at a zero crossing may bemore detrimental to measuring mechanical resonances than piezoelectricresonances.

At step 2020, a resonance detection and control circuit 560, coupled tothe piezoelectric actuator 140 as shown on FIG. 5, for example, may beactivated to measure various characteristics associated with the decayof the signal remaining in the piezoelectric mechanism 570. At step2030, the resonance detection and control circuit 560 may integrate thedetected signal 580. The integrated signal will have the greatestamplitudes, reflecting the maximum physical movement of thepiezoelectric actuator 540 and corresponding displacement of themechanical load 550, at the resonant frequencies of the mechanism 570.The resonance detection and control circuit 560 may be synchronized withthe driver 520 so as to window the integration of the measured signal580 over the relevant period of decay. For example, if integration begantoo early it could pick up the original drive signal 530, which is notof interest at this point in the analysis.

In the embodiment of FIG. 20 a resonance determination is made at step2040 based on an increase in the detected signal 580 compared to thesignal 580 taken at the previous input signal 530 frequency. If no suchincrease is detected, the frequency of the input signal 530 is changedat step 2050 to monitor the effect on the piezoelectric mechanism 170.Thus, at step 2040, an assessment could be made as to whether themechanism is in resonance or not. In certain embodiments the process ofsteps 2000 through 2040 could be repeated several times to actuallydetermine the resonant frequency of the system. Each time it isdetermined at step 2040 that the mechanism is not in resonant mode, thedrive frequency 520 could be adjusted at step 2050. For example, thefrequency of the drive signal 530 applied to the piezoelectric may bevaried in steps of, for example, 1 kHz apart, so as to observe theresponse of the mechanism 500 at varying drive frequencies until a clearspike in amplitude—i.e., a resonant response—is observed.

In the embodiment of FIG. 21 a defined set of frequencies are tested forthe input signal 530, by counting down the number of frequencies testedand determining at step 2160 whether the defined number of frequencieshas been tested and if not, changing the frequency at step 2050 andapplying the new input signal 530. Once the requisite number offrequencies has been run, a determination is made at step 2170 as to thefrequency at which the highest amplitude detected signal 580 wasobtained. Thus in the embodiment of FIG. 21, the order of the stepscould be changed slightly such that the determination as to whether aresonant response was observed occurs at the end of the process. At step2000 the drive signal 530 may be applied to the piezoelectric actuator540, and then at step 2010 it may be removed. The resonance detectionand control circuit may be activated at step 2020 and the measuredsignal 580 may be integrated at step 2030. At step 2160, the methodmight determine whether it has tested enough frequencies; for example,it might be required to test 10 different frequencies. If only one (orany number less than 10) has been tested, the method could jump to step2050 and change the drive signal frequency. This process may be repeateduntil the requisite number of frequencies has been tested, at whichpoint it could be determined whether one of the tested frequencies hasdemonstrated resonant behavior, i.e., as shown at step 2170.

The foregoing examples have assumed the use of single-tone drivefrequencies to locate the resonant frequency. One having ordinary skillin the art will understand, however, that these processes could beexpedited by, for example, using a multi-tone drive signal 530. Forinstance, the drive signal could have 10 tones spaced at 1 kHz, startingat 45 kHz, with the tones having equal amplitudes. In this manner, eachof the 10 frequencies could be analyzed simultaneously, i.e., send the10 frequency signal before waiting and evaluating the output signal 580.In yet another embodiment, the drive signal 530 could be a chirp, or anarbitrary wave form.

FIGS. 22 and 23 show the processed (integrated value at each frequency)sample waveforms (amplitude versus frequency) of the integrated signalof two exemplary systems according to the current disclosure.Specifically, FIG. 22 shows a sample waveform of a correlator-basedsystem, i.e., as shown in FIG. 26 and described in further detail below,while FIG. 23 shows a sample waveform of a fast Fourier transform (FFT)based system, i.e., as shown in FIGS. 24 and 25 and described in furtherdetail below.

The foregoing examples have assumed the use of single-tone drivefrequencies. One having ordinary skill in the art will understand,however, that these processes could be expedited by, for example, usinga multi-tone drive signal 530. For instance, the drive signal could have10 tones spaced at 1 kHz, starting at 45 kHz, with the tones havingequal amplitudes. In this manner, each of the 10 frequencies could beanalyzed simultaneously. In yet another embodiment, the drive signal 130could be a chirp, or an arbitrary wave form. For purposes of thisapplication, a Chirp is a signal where the frequency of the signal isswept continuously at a specified rate. The rate can be a linear ornonlinear function.

The foregoing description describes at a high level how such a systemworks. One having ordinary skill in the art will understand that thereare a variety of suitable electronic implementations. For example, asuitable resonance detection and control circuit 160 may be implementedin many different ways. In two embodiments, as shown in FIG. 24 and FIG.25, the resonance detection and control circuit 560 may comprise a fastFourier transform circuit. In the embodiment of FIG. 24, an analog FFTcircuit 2400 is coupled to an analog-to-digital converter (ADC) 2410. Inthe embodiment of FIG. 25, a resonance detection and control circuit 560may comprise an ADC 2500 coupled to a digital FFT 2510. A digital FFTmay be preferable over an analog FFT implementation because of ease ofimplementation in a standard microprocessor or microcontroller, such asa PIC microprocessor.

In yet another embodiment, as shown in FIG. 26, a resonance detectionand control circuit 560 may receive the output signal 580 after it hasbeen amplified in a pre-amplifier stage 2630. The resonance detectionand control circuit 560, in this embodiment, comprises a mixer 2600coupled to an integrator 2610. The mixer 2600 may be any form of digitalor analog circuitry capable of multiplying the drive signal 530 and themeasured signal 580. Such an implementation may be preferable insituations requiring very fast processing, as a mixer may be able toperform calculations in real time. The integrator 2610 may then becoupled to an ADC 2620 or any other amplitude measurement or trackingcircuit.

One having ordinary skill in the art will understand that, depending onthe characteristics of the overall system, it may be desirable toinclude certain optional pre-processing components. For example, asshown on FIG. 26, and as discussed above, it may be desirable to place apre-amp 2630 between the piezoelectric actuator 540 and the resonancedetection and control circuit 560 such that the measured signal 580and/or the drive signal 530 is amplified before processing.Alternatively, a resistive or capacitive divider (not pictured) may becoupled to the resonance detection and control circuit 560 in order, forexample, to convert the output 580 of the piezoelectric actuator 540 toa voltage suitable for input to the components implementing theresonance detection and control circuit 560. It will be understood thatthese components additionally may be desirable with respect to otherimplementations, including but not limited to those shown in FIGS. 24and 25.

FIG. 27 is a block diagram of one embodiment of a resonant frequencydetection circuit according to this disclosure. As shown in FIG. 27,piezoelectric element (or piezo) 540 is coupled to an isolationimpedance 2740, sampling FET 2750, capacitor 2760 and ADC 2720.

Sampling FET 2750 may be utilized to maintain the circuit in its dynamicrange, thereby ensuring that the circuit operates in its linear,operable range. Isolation impedance 2740 is configurable to allow thedrive signal (e.g., a 45 V drive signal) to be isolated from point Abetween isolation impedance 2740 and sampling FET 2750, capacitor 2760and ADC 2720, so that point A cannot go above a particular limitingvoltage (e.g., 3 V), in order to protect other components including ADC2720.

Thus, the drive signal may range up to a signal voltage SV (e.g., about45 V), as shown by the square wave input to piezo 540. Following a drivesignal a TEP signal (depicted by a decaying wave) is emitted by thepiezo 540. This signal passes through the isolation impedance to presenta reduced amplitude version at point A. The voltage at voltage-limitingor isolation point A, as defined between isolation impedance 2740 andone or more of sampling FET 2750, capacitor 2750 and ADC 2720, has amaximum value MV (e.g., about 3 V). The time-energy product (TEP) signalis also shown, for piezoelectric resonance detection andcharacterization, as disclosed herein, and as described in theincorporated references. In order to be able to analyze discrete samplesof the drive signal, the sampling FET 2750 is selectively turned off oron. From the above discussion, it will be appreciated that the TEP(Time-Energy Product) is the energy stored in the piezoelectric/membranecombination i.e. in the fluid filled ejector mechanism. Depending on thequality factor of the mode, more or less energy will be stored. The lessdampening in the mode, the longer the system will continue to move afterthe drive signal has terminated. This means that the piezoelectric willoutput a signal after the drive signal is turned off (based on theloading circuit). Thus, during this ring-down time the signal generatedwill have a maximum amplitude and ringing time based on the Qualityfactor of the mode and whether it is a piezoelectric mode or a system(membrane) mode. The TEP signal charges the capacitor and is used by theanalog to digital converter (ADC) 2720 to determine the ring-down time.Thus the TEP signal can be correlated or integrated to determine theenergy storage in the mode.

FIG. 28 shows selected components of one embodiment of a resonancedetection and control circuit 560 with an optional bypass switch 2800.The bypass switch 2800 may be used to select between input directly tothe ADC 2810 or first through a pre-amplifier 2820, mixer 2830, andintegrator 2840. When the full resonance detection and control circuit560 is enabled, the NCO or oscillator is turned on in single frequencymode and swept in frequency. If the output of the resonance detectionand control circuit 2810 is greater than a defined value or a maximum,it defines a resonance. The strength of the resonance is determined bythe amplitude of the resonance detection and control circuit 2810output. The boost converter (not shown) is controlled by a gatedoscillator using the Analog to Digital Convertor (ADC) output to samplethe output voltage. In the case of inductors added to the full bridgeoutput, the piezoelectric actuator voltage is monitored in order tocontrol the boost voltage output. The boost voltage output is furtheramplified by the resonant converter formed by the piezo and inductorswithout increasing the input current as opposed to conventional resonantmatching which results in real power transfer rather than energy storagein the resonant elements. In this embodiment, the measurement circuit isimplemented as a resistor divider and a peak detector, which are used tomonitor the voltage in the tank, both for voltage control, and alsoduring Quality factor sweeps with electrically resonant tanks. Thisfeeds the ADC. TEP cannot be used with a resonant converter because theelectrical resonance is orders of magnitude stronger.

In another embodiment, with reference to FIG. 18 A, a resonancedetection and control circuit operates such that the N-channel device,T7, is turned on throughout the full bridge drive cycle in order toground the measurement node while the high drive voltages applied to thepiezoelectric actuator (ejector) are activated (to protect the ADC).When the high voltage drive signal stops, the N-channel devices T5 andT6 are enabled (turned on) to temporarily short the piezoelectricactuator. This both drains off the high drive voltage to thepiezoelectric actuator (that masks piezoelectric movement voltage) andallows the voltage induced by the movement of the actuator to beunmasked and directed to the ADC node. The N-channel device T5 is on forthe entirety of the measurement cycle, while T6 is disabled (turned off)after a short amount of time (1 ns-50 us) to force the piezoelectricmovement to output a voltage to the ADC node. Without the short of T6,the energy is not necessarily directed to the ADC measurement port. WhenT6 is disabled, T7 is also disabled, allowing the output of thepiezoelectric to be voltage divided by R3/(R2+R3) and integrated by thecapacitance from C1 and T7. The ADC samples the voltage at a prescribedtime after T7 is disabled, usually between 1 μs and 500 μs. Thetransistor T7 may be switched at the rate of the original drive signalto correlate with specific frequencies.

Examples of drive signals are shown in FIG. 29, for both sides of thepiezoelectric actuator and the corresponding signals applied to T5, T6,and T7. This sequence and ADC measurement may be done at definedfrequency steps from 1 Hz to 150 MHz, e.g., 150 kHz, 10 MHz, etc. Thelargest integration value may be chosen as the spray frequency, althoughmathematical corrections related to specific spray dynamics may beapplied (such as increase in ejector velocity with frequency, andpiezoelectric vs. membrane mode displacement) and voltage couplingcoefficients can be applied to make the mechanism more accurate.

In one embodiment, an electromechanical system according to the presentdisclosure may determine the frequency and quality factor of itsresonances. In another embodiment, an electromechanical system asdescribed herein may permit tracking of its resonances as they changedue to mechanical loading, applied drive signal, and ambienttemperature, or any combination thereof. Such aspects and resonancetracking may be accomplished without a feedback electrode, the use ofwhich may impact droplet generation, efficiency and mass deposition on adesired target in a fluid ejection system. Additional benefits inspecific applications may also be realized in accordance with thepresent disclosure.

For instance, in certain embodiments, the resonance tracking describedherein may be utilized in any of the droplet generator devices of thedisclosure. The droplet generator device can thus be made to bringitself back into resonance mode. Short duration drives at differentfrequencies are used to map the resonance amplitude across a range offrequencies. (This range of frequencies can be calculated by determiningthe maximum statistical difference between parts infabrication/manufacturing.) The output after a spray may be compared tothe original resonance mapping of the droplet generator device to fixany drift and for spray verification. In such a use, resonance trackingcan be accomplished without a feedback electrode, which would have theeffect of reducing mass deposition in the fluid ejection mechanism asdescribed therein.

A charge isolated ejector (double layer flex circuit, 50 μm SS316Lannulus, gold coated 40×160, 57 hole ejector element, 19 mm OD×13 mm ID250 μm thick PZT) was driven to eject at frequencies from 10 kHz to 150kHz. Mass deposition and electrical waveforms were recorded at eachfrequency at the same instant.

The level shifting driver circuit shown in FIG. 30 is driven by aMICROCHIP PIC16LF1503 from the internal complementary waveformgenerator. The level shifting driver drives the Full Bridge whichactuates the piezoelectric element. The MICROCHIP PIC16LF1503 waits 10seconds between each frequency to allow the OHAUS PA214 scale to reachequilibrium during mass deposition measurement. The MicrochipPIC16LF1503 also provides all necessary driver signals (for T5-T7referenced in FIG. 18A). Electrical signals are recorded on an AGILIENT3014A oscilloscope and are subsequently processed in MATLAB byintegrating the signal up to the measurement time of the PIC16LF1503 todemonstrate operation of resonance measurement and control (Digitallyimplementing various analog filters to determine optimum circuitcomponents).

The integrated piezoelectric output signal, sampled 30 μs from the timewhen T7 is disabled, closely tracks the movement and mass deposition ofthe mechanism across frequency, as shown in FIG. 31 and FIG. 32. FIG. 31shows the mass deposition in membrane mode and piezoelectric mode, whileFIG. 32 shows the resonance measurement output. Output is stronger forpiezoelectric modes (where only a piezoelectric actuator is involved) asopposed to membrane mode (where the actuator is coupled to a membrane,which may take the form of a fluid-filled ejector mechanism), and mustbe corrected using a movement to voltage coupling parameter for both thepiezoelectric modes and membrane modes. Coupling parameters aredetermined by sinusoidal excitation of the actuator and measurement ofmovement using the Digital Holographic Microscopy (DHM). Couplingparameters simply scale results in a given frequency region (weightthem) to provide optimum ejection. Furthermore, frequency and amplitudeof movement can be used to calculate ejector velocities which can beused to determine optimum spray. The circuit may be used withoutcorrection if operation is limited to either piezoelectric or membranemodes, i.e. mixed operation is not allowed. The circuit tracks only thedisplacement of the system, which is loosely correlated to spray.Accurate spray computation requires coupling constants and velocitycomputation. The resonance measurement and control system can beconfigured in either manner.

While specific embodiments have been discussed above to determine andprovide resonance signals to an actuator (piezoelectric mode) or to anejector mechanism (membrane mode), it will be understood by thoseskilled in the art that various changes may be made and equivalents maybe substituted for elements thereof, without departing from the spiritand scope of the invention. In addition, modifications may be made toadapt the teachings of the invention to particular situations andmaterials, without departing from the essential scope thereof.

While the above discussion discussed the value of determining and usingresonant frequencies in driving the piezoelectric actuator, theparticular drive signal or drive waveform also impacts the stability andrepeatability of the ejector device by influencing beading and wettingon the front or anterior surface of the ejector mechanism.

FIG. 33 is a schematic circuit diagram of one embodiment of a circuit3300 for implementing a droplet generation system in any ofconfigurations described above. In this particular embodiment, circuit3300 is configured for a gated oscillator boost implementation of thedriver, e.g., driver 520, as described herein, and as disclosed in theincorporated references.

As shown in FIG. 33, circuit 3300 includes one or more additionalelectronic components, including, but not limited to, switchingcomponents S1-S4, capacitors C1-C4, diode D1, comparator U1, inverterU3, pulse width modulation circuit (PWM), which includes PW envelopegenerator V2, invertors U5-U6, logical NAND gates U2 and U4, and NORgate U8, controlling the gate of transistor Q1 to control the comparatorU1 feeding the PWM circuit, and to control the voltage to the power railof the switches S1-S4. These additional components are utilized togenerate delay, phase shifts, gating, summing, signal boost, and otherpower and signal conditioning effects to generate pulse-width modulatedPWM signals for driving actuator, e.g., actuator 540 discussed above.The mechanical load, e.g., load 550, may include, for example, anactuator attached to a fluid-loaded ejector plate, or to an ejectorplate coupled to a fluid-loaded generator plate based on single-tone ormulti-tone numerically controlled oscillator (NCO) signals, as describedabove.

FIGS. 34A, B are plots of a fluid relaxation waveform versus time usingone embodiment of a device of this disclosure. The drive signal voltageis delivered in two bursts, from approximately 25 ms to just over 25.5ms on the time axis (horizontal), and from approximately 27.5 ms to justover 28 ms on the time axis.

As shown in FIG. 34A, the back EMF signal follows the drive signal andthen decays with a characteristic time scale of a few tenths of amillisecond, for example with an exponential decay constant in a rangeof about 0.1-0.5 ms, or about 0.2-0.3 ms. As a result, there may befluid ejection from the device after the drive signal is terminated.There may also be a residual bias that decays on a somewhat longer timescale of about 1 ms or more, as shown by the separation between thedrive signal voltage (at zero) and the back EMF signal between the firstand second burst.

FIG. 34B is an expanded view of the fluid relaxation waveform plot inFIG. 34A, showing the back EMF ring-down after termination of the drivesignal. As shown in FIG. 34B, there may be substantial motion of theejector plate after termination of the drive signal, leading tocontinued droplet formation as described above. There is also a phaseshift between the drive signal and back EMF, which may cause thefluid-loaded ejector plate motion to lag (or in this case, lead) thedrive signal waveform

Prior to excitation by the drive waveform, the ejector plate assemblystarts from a resting state, in which there is no mechanical movement.As the electrical drive signal is applied to induce movement, there is afinite time lag before droplets are ejected. Where there is more thanone opening in the droplet generator, each opening may have a differentcharacteristic time to reach the necessary velocity for fluid ejection,depending on the oscillation mode (or modes) and corresponding resonancefrequency (or frequencies). Thus, the characteristic lead time beforedroplet formation is a function of drive voltage, frequency, apertureposition, and eigenmode shape, as defined by the oscillating ejectorplate or droplet generator.

Where fluid is expressed through an opening before reaching sufficientvelocity for droplet generation, beading may occur, further delaying theonset of droplet formation and decreasing mass deposition and fluiddelivery. Fluid beading may also increase the wetted ejector platemomentum, lengthening the characteristic ring-down time aftertermination of the drive signal.

To reduce beading, the ejector system may be driven for a selected time,herein also referred to as a continuous drive length. In particular, thetime may be selected for the ejector plate to reach sufficient velocityto eject one (or more) droplets from one or more openings positioned invarious locations on the drop generator, or in an ejection region in acentral area of the ejector plate, depending on the eigenmodes of theparticular structure. According to one aspect of the present disclosurethe drive signal may be selected to operate in a drop on demand mode. Inthis mode the actuator is driven for a certain number of cyclesdetermined by the fluid properties, then driving stops to allow thesystem to relax, whereafter the continuous drive length sequence isrepeated. This may be performed the desired number of times to achievethe desired mass transfer of fluid. Droplet on demand mode has theeffect of reducing fluid beading and thus reducing momentum of theejector mechanism, thereby increasing mass transfer to the dropletstream and lowering ring-down time after the drive signal is cut off.The continuous drive length is also selected depending on desireddosage, fluid viscosity, oscillation mode and ejector configuration, andother parameters, and may vary from about 1 ms or less to about 10 ms ormore, or in a range of about 1-2 ms, or less, or about 2-5 ms, or more.

Fluid beading may be reduced or suppressed by driving the piezoelectricactuator for a selected number of cycles, sufficient for one or moredroplets to be ejected from one or more openings. The number of cyclesis also selected based on parameters including, but not limited to,desired dosage, fluid viscosity, oscillation mode and ejectorconfiguration, for example in a range of about 1 cycle to about 10cycles, for example, in the range of about 2-5 cycles. Alternatively,the actuator 1604 may be driven for 10 cycles or more, for example about10-20 cycles, or in a range of about 10-60 cycles or more, for exampleabout 10, 20, 30, 40, 50 or 60 cycles.

In other applications, continuous fluid ejection via jetting isnecessary in order to deliver relatively larger volumes of liquid (forexample, in the range of 0.5-30 μl or more). Ejecting in continuous mode(that is, with a continuous drive signal), however, can also result inbeading. Without intending to be limited by any particular theory,beading may arise, for example, due to chaotic jets, satellite dropletrecapture, induction, and charge effects, as described above. Where afluid bead forms over an opening, moreover, the bad fluid volume maytend to increase over additional cycles of the actuator, for example viapumping action and related hydrodynamic effects. Continuous pumping mayeventually lead to wetting on the distal surface of the oscillatingejector plate (or droplet generator plate), resulting in increasedmomentum, Coulomb attraction, and related mechanical andelectromechanical effects.

The piezoelectric actuator may also be driven for a selected number ofcycles followed by a period between drive signals, which may becharacterized as a relaxation time or relaxation time period. Thecessation of the oscillating drive voltage during the relaxation timeperiod results in decay of the fluid filled ejector plate oscillations,over the characteristic ring-down time. The ring-down time depends, forexample, on the magnitude of the ejector plate and actuator motion, andthe mass of the fluid-wetted ejector system. Depending on theapplication, a relaxation time period selected based on the ring-downtime may reduce beading. This intermittent driving of the actuator willbe referred to herein as pulsed operation mode. The mass ejection rate(per unit time) may be reduced in pulsed operation mode, depending onthe drive pulse width and relaxation time, for example by about onethird, about one half, or about two thirds, as compared to a continuousjetting mode of operation.

In some embodiments, movement of the piezoelectric actuator aftercessation of the drive signal may be monitored by detecting the back EMF(or back voltage) induced by residual motion of the piezoelectricactuator, which is mechanically coupled to the ejector plate. Forexample, the back EMF may be monitored via a metallization layer orelectronic sensor electrically isolated from the actuator surface, asdescribed above with respect to FIG. 4, or using a back-voltage inducedon the drive signal circuit, for example via the drive electrodes orother conducting layer in direct contact with the actuator surface.

The ring-down time may thus be determined by the time required for theresidual ejector plate and fluid oscillations to drop below a particularthreshold, based on the back EMF signal. This has an advantage overfixed relaxation time applications, because the relaxation time isautomatically adjusted for droplet formation, wetting, fluid viscosity,and other factors, based on their effect on the ring-down time of thefluid-wetted ejector assembly.

For example, the relaxation time may be defined by the time required forthe back EMF voltage to become less than a selected fraction of itsinitial value, on cessation of the drive signal, for example about onetenth (10%) of the initial value. Alternatively, a different fractionmay be selected, for example about one twentieth (5%) or less, or aboutone fifth (20%), about one third (33%), about half (50%), or a differentratio such as 1/e, or a multiple thereof. In additional applications,the relaxation time period may be selected based on an absolutethreshold, for example based on correlating the back EMF signal to aselected magnitude or velocity of oscillation for the fluid-loadedejector plate.

FIG. 35 is a set of amplitude vs. time plots of drive signal waveformsand corresponding piezoelectric movement waveforms, showing the phaseshift between the two waveforms over time. Each of FIGS. 35A-D shows adifferent approach for generating ring-down damping signals in order toreduce residual motion after termination of the drive signal. Acancellation waveform may be generated in the form of an active dampingor braking signal, based on the observed magnitude and phase of thering-down feedback signal. For instance in FIG. 35A the cancellationsignal simply comprises generating a half wave that is opposite or phaseshifted by 180 degrees relative to the original wave signal. In FIG.35B, in addition to generating an opposite half wave, the amplitude ofthe opposite waveform is adjusted. In FIG. 35C the opposite half wave isalso time shifted to achieve an additional phase shift. In FIG. 35D asmall pulse of opposite phase and higher frequency is generated.

In general, the damping signal may be shifted in phase with respect tothe drive signal, and reduced in magnitude (combination of FIGS. 35B and35C). The magnitude is determined based on the magnitude of the back EMFsignal, for example using an actuator sensor or back voltage in thedrive circuit to generate ring-down or feedback signal 580 for resonancedetection and control circuit 560, as shown in the piezoelectric systemsabove. Relaxation waveform and ring-down analyses are performed on theback EMF signal in order to generate a pulse width modulated (PWM)damping signal with appropriate magnitude and phase delay, for exampleas described above with respect to the various components of circuit3300 of FIG. 33.

Depending on the application, the fluid oscillation on the dropgenerator may or may not occur at the same frequency as ring-downoscillation of the ejector plate itself. To the extent that this occurs,or in any case where multiple modes are excited, the back EMF signalwill exhibit multiple frequencies and beating, as described below, andthe active damping signal may be modified accordingly, for example byproviding a combination of two or more different damping signals withdifferent magnitude, phase and frequency.

Alternatively, a single short pulse or “chirp” signal may be utilized,based on the desired level of signal complexity and the required effecton the ring-down signal. For example, an “anti-phase” cancellation ordamping signal may be applied, either based on the phase of the drivewaveform itself, or based on the timing of the back EMF signal. In thisapplication a smaller, opposite polarity damping signal may be providedwith timing and amplitude selected to absorb or cancel residualoscillation energy and cause the actuator and load to brake in a mannersimilar to that of a vehicle.

Once any cancellation waveform or active damping (braking) signal isapplied, a relaxation period may be utilized before applying anotherdrive signal, as described above. Thus, the droplet generator may bedriven in a pulsed or continuous pulsed mode, with or without dampingwaveforms following each pulse.

Droplets may also be generated in single-pulse mode, with fluid deliveryover a single, finite drive waveform extending over a particular numberof cycles, with or without a following active damping signal. In thissingle-pulse mode of operation, the relaxation time may be consideredarbitrary, extending until an independently triggered (e.g.,user-selected) activation of the device.

Thus, a range of different methods may be utilized to generate dampingsignals. For example, an equal amplitude waveform may be applied, withamplitude based on energy stored in the piezoelectric, and 180° phaseshifting (opposite polarity) based on the phase of the back EMF signal.Alternatively, one or more unequal amplitude pulses may be applied withopposite polarity or a different phase shift, based on the availablepositive or negative supply voltages. In single-pulse or “chirp” dampingwaveforms, the energy in the waveform may be selected to match that ofthe fluid-loaded ejector plate and actuator system, and delivered withopposite polarity or other phase shift selected for maximum energyabsorption, utilizing time-energy balancing to cancel the residualoscillations and reduce ring-down time.

In pulsed or “limited cycle” modes of operation, the actuator may bedriven for a limited number of cycles, below the characteristic beadingtime of the ejector system, followed by a relaxation period based on thecharacteristic ring-down time, and repeated as necessary to reach thedesired fluid dosage or mass deposition. While mass ejection per unittime is nominally reduced, as described above, this may be offset by thebenefits of reduced beading. The relaxation or “dead” time betweendelivery pulses can be lowered by application of an appropriate dampingsignal.

In this mode, the droplet generator may be driven for a limited numberof cycles below the characteristic beading time of the ejector platesystem, followed by application of an anti-phase (opposite polarity)waveform, based on the corresponding phase of the back EMF signal. Theamplitude and phase may be selected for energy balance, in order toabsorb a substantial fraction of the residual oscillation energy in asingle pulse, or the amplitude and phase may vary, as described above.The damping waveform or “braking” signal may be controlled to reduce themotion of the actuator and ejector plate membrane, followed byadditional ring-down of the fluid itself, during which no new drivesignal is applied.

The complete waveform thus includes a limited-cycle drive signal,followed by a damping signal and relaxation or dead time for fluidring-down, and is repeated as necessary in order to achieve the desiredfluid dosage or mass deposition. Based on the reduced ring-down time, ascompared to a limited cycle drive without active damping or brakingsignal, this mode provides both a reduced beading and increased fluiddelivery rate, as defined in terms of fluid mass per unit time.

EXAMPLES Example 1

Ejector Mechanism. In this example, a symmetric (e.g., 21 mm diameterstainless steel) ejector plate 104 was utilized, with a pattern ofopenings 126 provided in a droplet generator 132 formed in the centralregion of ejector plate 104. A driver circuit 520 was used to generatethe drive signals, with a resonance or feedback circuit 560, to measurethe back EMF or feedback voltage signal from the (e.g., piezoelectric)actuator, and control the driver circuit to provide a damping signalafter each drive waveform. Other techniques for generating differentdrive waveforms and damping signals are also contemplated, as describedabove, and as disclosed in the incorporated references.

The ejector mechanism was operated in contact with a fluid reservoir,and provided with a driver signal (e.g., sinusoidal or square wave) topump fluid through the openings of the droplet generator and eject thefluid in the form of a droplet stream. Where a continuous drive signalmay result in beading of the fluid, a short burst or limited-cycle timemay be used, for example about 150 ms or less, about 100 ms or less,about 50 ms or less, or about 25 ms or less. An electrically isolatedpad or back EMF sensor may be attached to the actuator in order tomonitor motion of the ejector assembly with respect to the drive signal,and to provide a residual oscillation cancellation signal aftertermination of the drive signal, in order to reduce ring-down time andincrease the net fluid delivery rate.

Example 2

Piezoelectric Relaxation and Fluid Relaxation. In this example, anactuator driven in a resonant mode will continue to oscillate after thedrive signal ceases, for a given period defined by the relaxation time.Even as the motion of the actuator and ejector system is reduced, themembrane or droplet generator will continue to oscillate due to theadditional energy in the fluid-loaded mechanism. Fluid beading willoccur if the piezoelectric is driven before the fluid has been allowedto relax, and beading and fluid oscillations will increase over repeatedcycles if the dead time between cycles is insufficient.

FIG. 36 is a plot of a fluid relaxation waveform, illustrating thesephenomena following removal of a drive signal. The piezoelectric backEMF voltage (vertical scale) is generated by movement of thepiezoelectric actuator, and may be taken from an electrically isolatedmetal pad or back EMF sensor on top of the piezoelectric, as describedabove. The back EMF indicates that ring-down of the actuator assemblyoccurs on a time scale of a millisecond or so, for example about a halfmillisecond or less, or about 0.2-0.3 ms, depending on relativeamplitude threshold. Over this relaxation period, the magnitude ofoscillation may result in fluid ejection for a significant time periodafter the drive signal is terminated, for example up to 1-10 times thelength of the drive signal waveform itself.

The fluid relaxation time of the fluid-filled mechanism (also referredto herein as the ejector mechanism) may be two to three times thering-down time of the actuator itself, for example a millisecond ormore, or in the range of about 1-2 ms or about 2-4 ms, depending onejector design, fluid loading, hole size, and other factors. The fluidmust be allowed to relax over this typically slower relaxation time, inorder to prevent beading.

FIG. 37 is a plot of the fluid relaxation waveform following a soft rampdown, illustrating how the actuator assembly reacts when the drivesignal is reduced linearly. The amplitude of the residual oscillationactually increases during the ramp-down period, and even after the drivesignal reaches zero, due to energy storage in the actuator itself (forexample, in the piezoelectric element, which may be a ceramic element).This energy is dissipated relatively slowly, for example over a fewhundred cycles of the harmonic oscillation.

FIG. 38A is a plot of a relaxation waveform after a five-cycleexcitation, where the drive signal was stopped abruptly. FIG. 38B is anexpanded view of the relaxation waveform in FIG. 38A, showing harmonicproduction (“beating”) in the ring-down signal. As shown in FIGS. 38Aand 38B, not only does the actuator assembly continue moving after thedrive signal is terminated, it can also generate relatively largeharmonics and cross modulation products, which in turn may generatemotion in resonant modes (“eigenmodes”) having shapes favorable forbeading.

Example 3

Cancellation Waveforms. In this example, cancellation waveforms wereused to reduce such residual motion and ring-down time.

FIG. 39A is a plot of a fluid relaxation waveform after a ten-cycleexcitation with an active damping waveform. FIG. 39B is an expanded viewof the relaxation waveform in FIG. 39A, illustrating reduced relaxationtime and harmonic production. As shown in FIGS. 39A and 39B, a dampingsignal is generated after the drive signal in order to absorb energystored in the (piezoelectric) actuator. Although the ejector mechanismstill continues to move after the damping signal is applied, therelaxation time is substantially lower, and harmonics and crossmodulation products (“beats”) are suppressed. This enables higher massdeposition rates, with reduced beading.

FIG. 40 is a plot of a relaxation waveform after a ten-cycle square waveexcitation, with active damping signal. As shown, both the drive signalsand damping signals may be provided as substantially square waves.

FIG. 41 is a plot illustrating the relaxation waveform for the samesquare wave excitation as used in FIG. 40, but without the dampingsignal.

FIG. 42 is a plot illustrating piezoelectric and fluid relaxation aftertwo periods of a ten cycle square wave drive signal, with active dampingsignal and relaxation dead time. FIG. 42 shows two complete cycles of afully assembled waveform, including a ten-cycle square wave drivesignal, active damping signal for braking the piezoelectric actuator,and fluid relaxation (dead) time between repetitions.

Example 4

Beading of Fluid. This example utilized an ejector mechanism accordingto Example 1, above, in which beading was observed when the drivevoltage is a simple sinusoidal or square wave. In this particularexample, the drive signal waveform was 50 ms long.

In order to illustrate the benefits of relaxation time and an activedamping signal, pictures were taken of an ejector at various stages,using two different viscosity liquids: distilled water and latanaprost,a topical medication used to reduce pressure inside the eye.

The distilled water and latanaprost images were captured with ahigh-speed (75,000 frames per second). For both fluids, the initialspray demonstrated a resonant mode of the generator plate, but not everyhole ejected droplets. At 30% through the spray signal, continuousspraying without allowing for relaxation or “ring-down” resulted in theformation of large beads. At 60% through the spray signal, satellitedroplets were created from chaotic spray collisions, which increasedwhen there was no relaxation time, and level of beading and collisionsincreased as the spray continued. After the cycle was complete, largesatellite droplets and beading were observed.

Example 5

Suppression of Beading and Satellite Droplet Formation. This examplealso utilized an ejector mechanism according to Example 1, above, butbeading was suppressed utilizing one or more of the limited-cycle(repeated pulse), relaxation time, and active damping techniquesdescribed above.

Again water was compared to latanaprost but using active damping andrelaxation. Again the initial spray images showed a resonant mode of thegenerator plate, but not every hole ejected fluid. This demonstratesthat mode is non-trivial, and must be carefully determined incombination with the selected hole pattern and ejector plate geometry.At mid-cycle, droplets emerged from a majority of the ejection sites(openings) in a linear stream. There were fewer chaotic streams, therebyreducing satellite droplet formation, as compared to spray modes thatshow poor ejection. Beading was suppressed for both fluids in thisexample, and larger beads were substantially absent, or not observed.After the cycle was complete, large satellite droplets weresignificantly reduced, and substantially no beading was observed in theopenings. Some satellite droplets could be observed, but they weresubstantially absent from the droplet formation sites.

In various additional examples, a method was provided for applying afirst alternating voltage for one or more cycles to a piezoelectricactuator operable to oscillate an ejector mechanism so as to generatedroplets of a fluid, stopping the first alternating voltage and applyinga cancellation waveform or active damping signal, waiting for a firstrelaxation time period, applying a second alternating voltage for one ormore cycles to said piezoelectric actuator, stopping the secondalternating voltage and applying a cancellation waveform, and waitingfor a second relaxation time period. The ejector mechanism may includean ejector plate having a proximal surface in contact with a fluid andone or more openings, with a piezoelectric actuator to oscillate theplate upon application of a drive voltage. The steps may be repeated oneor more times to generate or deliver a selected volume of the fluid, forexample in the form of a stream of droplets. The volume may be selectedbetween about 5 μl and about 30 μl. The ejector mechanism may also beconfigured to eject the stream of droplets with an average ejecteddroplet diameter greater than about 15 microns.

The ejector may be configured for passivation and charge isolation withrespect to the drive voltage. The cancellation waveform may be phaseshifted with respect to the drive voltage and have amplitudesubstantially equal to or different from the drive voltage. The phaseshift may be 180 degrees, so that the cancellation waveform has anopposite polarity with respect to one or both of the alternating drivevoltages. Alternatively, the cancellation waveform may be substantiallyin phase with one or both of the alternating drive voltages, or have atime delay selected for a different phase shift with respect to one orboth of the alternating voltages.

The cancellation waveform may also have unequal amplitude with respectto one or both of the alternating voltages, for example smalleramplitude than one or both of the alternating drive voltages. Thecancellation waveform may also have amplitude selected for the waveformto have energy substantially equal to energy stored in the piezoelectricactuator.

Any one or more of the first and second alternating voltages and thecancellation waveform may be pulse width modulated, or comprise orconsist essentially of a substantially square wave or a substantiallysinusoidal wave. For example, both of the alternating voltages may besubstantially sinusoidal, or substantially a square wave, or acombination of a sinusoidal and a square wave.

One or both of the relaxation time periods may be based on resonancemonitoring of the actuator, for example by detecting a back EMF voltage.One or both relaxation time periods may be proportional to the number ofcycles of one or both of the alternating voltages, and the number ofcycles may be between one and about thirty. One or both relaxation timeperiods may also be determined when the back EMF voltage has a certainthreshold value, for example as a fraction of an initial value, or oneor both relaxation time periods may be proportional to the number ofcycles of one or more of the alternating voltages.

Example 6

In one embodiment the ejector device is implemented as a two part devicecomprising an ejector assembly with fluid reservoir (also referred toherein as a cartridge) and a base system. The base system is configuredto receive and engage with the cartridge in complementary fashion. Whena user inserts the cartridge into the base system, electrical contact ismade and the cartridge becomes active. In one embodiment, a cartridgeEEPROM is read to start a countdown on disabling the cartridge.

A front rotary seal may be provided that covers the ejector mechanism ofthe cartridge, and is configured to be turned in order to open orprovide line of sight access to the ejector holes of the ejectormechanism. The turning also triggers a magnetic switch in the cartridgewhich is relayed to a microcontroller unit to bring it out of sleepmode. A targeting system (blue LED) is also turned on and the boostconverter started.

An auto-tuning or quality sweep (Q-sweep) is initiated to set the sprayfrequency. In this embodiment the Q-sweep involves the generation ofthree cycles of each of a range of frequencies within a predeterminedfrequency range and TEP feedback is obtained to find the optimal sprayfrequency regions. This is discussed in greater detail below. Theinitiation of the sweep may be triggered either by turning the frontrotary seal or by activating a spray button, and in one embodiment theactivation mechanism can be software selected. After the Q-sweep iscomplete, a boost converter configured to act as a charge pump raisesthe annulus (piezo ejector) voltage to a prescribed voltage for thatproduct by charging up a boost rail to the desired voltage. The rangecan for instance be 0 to 120V.

A second switch is triggered when the user depresses the spray button.Upon this event, a gated complementary waveform generator (CWG) drives alevel shifter circuit, which in turn drives a full bridge to drive thepiezoelectric actuator and deliver the drug. The ejector mechanismejects via either constant voltage drive (the boost duty cycle isconstantly adjusted to balance the boost output voltage and thus theamplification in the resonant tank) or an overshoot drive, which isaccomplished by charging the boost up and then turning the drive oncausing massive overshoot for high velocity spray. While constantvoltage can be used in either continuous or droplet on demand modes (ONfor x cycles—OFF for y cycles—Repeat), overshoot can only be used withdroplet on demand.

Further, the drive signal frequency can be constant frequency ordithered. Dithered means the frequency is swept (like a chirp) over aset bandwidth (3 k, 5 k, 10 k, 20 k). Dithering causes abrupt velocitychanges in the piezoelectric movement resulting in better ejection.Dithering can for instance be performed quickly (within the decay timeof the resonant tank) to generate a constant multi-tone signal.

An IR based volume detection circuit may be included to measure volumeof liquid delivered during the spray and extends or contracts the spraytime to deliver the correct dosing volume. After a predefined period oftime (in this embodiment, after 10 seconds), all LED's are shut down andthe device goes back into sleep mode until the user closes and reopensthe front rotary seal.

Since the auto-tuning comprises one aspect of the present invention, aparticular implementation will be described in more detail below.

The purpose of the auto-tuning system is to allow the piezoelectricejector system to dynamically adjust itself to slight materialdifferences and changing environmental variables and is critical to areliable and manufacturable product.

The frequency generated by the numerically controlled oscillator (NCO)and CWG is incremented in set amounts over a defined range as high as 1kHz to 200 kHz, but often 80-150 kHz in 1 kHz or 0.5 kHz increments. Thebattery voltage is compensated to take account of gradual depletion ofthe battery, whereafter the boost rail is charged to a constant voltageusing analog-to-digital (ADC) sampling feedback. The tank (resonantstructure defined by the capacitive piezoelectric actuator (piezo) andone or more inductors) is then driven for a brief period, preferably theminimum possible sample size, e.g., 1.5-2.5 periods at a singlefrequency. The drive signal is repeated 3-5 times in quick succession atthis frequency in order to charge the capacitor in an integrating peakdetector with the same amplitude coefficient (voltage) each time. Theamplitude coefficient is recorded and the procedure repeated at the nextfrequency. This repetition of a low voltage signal significantlyimproves the signal to noise ratio of the measurement and prevents thesystem from ejecting while determining the optimum resonant frequenciesto spray at.

Auto-tuning is achieved by driving the ejectors with a low voltage andmeasuring the piezo/inductor tank response (Q-factor.) When done acrossa broad frequency range this characterizes the ejector system and findsthe peak frequency.

In order for the Q sweep to work properly the drive voltage needs to behigh enough to properly drive energy into the piezoelectric, however, itmust be low enough to not cause any unwanted ejection. Therefore thedrive voltage has to be closely monitored by the microcontroller.

The Analog to Digital converter (ADC) used to monitor the drive voltageis mathematically compensated to maintain accurate measurement as thebatteries de-rate and drop in voltage.

In this embodiment the sweep is software controlled by means of analgorithm that first checks the output range to ensure the propervoltage threshold has been met. The sweep will be a constant outputwithout a high enough voltage for ejection of fluid, therefore if theoutput range is too low the voltage is increased slightly and the sweepis repeated.

The sweep is repeated in bursts looking for a consistent peak frequencyacross multiple measurements. If the peak is inconsistent the voltage isslightly increased and the burst is repeated. If two peaks remain equalthe microcontroller will select the peak in the prior programmed optimalfrequency range for ejection.

The components for generating the drive signal are depicted in the blockdiagram of FIG. 43, which shows a full bridge driver with integrateddrive gating. A numerically controlled oscillator (NCO) 4300 creates thedrive signal with high frequency resolution. A second numericallycontrolled oscillator 4302 is gated by means of logic 4304 with thefirst NCO in order to disable the complementary waveform generator (CWG)4306 periodically without a huge software load on processor resources.This allows both extended FET life and relaxation of the ejector systemat any frequency to combat spray “beading” issues as was discussedabove. Timers could also be used to accomplish this. The logic combinedsignal is input into the complementary waveform generator 4306 whichoutputs two anti-phase square waves with adjustable dead bands to thelevel shifter circuit 4308, which translates 2.0V-3.5V to +35 for thePMOS (not shown) and +10 for the NMOS (not shown) of the full bridge4310 to minimize switching losses and ON resistance. The CWG 4306effectively alternates the number of “on” cycles driving the piezo withthe number of “off” cycles to allow fluid relaxation.

A circuit diagram of one embodiment of a level shifter circuit 4308 fordriving NMOS and PMOS is shown in FIG. 44.

It differentially drives the actuator using a 45V boost converter output(V_Boost) and is driven with anti-phase square waves from the CWG (CWG_Pand CWG_N), which control the gates of FETs T1 and T10. The PMOS outputs(FB_P1 and FB_P2) are +45V to +35V, while the NMOS outputs (FB_N1 andFB_N2) are 0V to +10V.

As discussed above, the present embodiment also provides for infra-red(IR) spray volume detection. An IR LED is driven with up to 1.8V forwarddrop and a current of 65 mA. A phototransistor measures the lightintensity and provides an analog output voltage between 0V and thebattery voltage, which is read by the ADC. The spray has been shown tohave a substantially linear voltage to spray volume response.

One embodiment of such an IR spray volume detection circuit is shown inFIG. 45.

In the present embodiment three batteries each providing approximately1.5 V are used as the portable power source. In another embodiment onlytwo batteries were used, necessitating the use of a 2× charge pump toraise the battery voltage sufficiently to drive the high luminositytargeting system LED. One embodiment of such a charge pump used a pulsewidth modulated signal from the microcontroller peripheral. A schematiccircuit diagram of one embodiment of a charge pump circuit for atargeting LED is shown in FIG. 46.

As a further aspect of the present embodiment, the device provides aDrug Cartridge Enable/Disable/Timer. This is implemented in the presentembodiment as a two wire serial interface EEPROM that is provided on thecartridge to allow unique identification, e.g., by means of a serialnumber. The serial number could be erased after a pre-defined usageperiod to permanently disable the cartridge. The serial number could beconfigured in different ways, e.g., the first few bits could be amanufacturer's identifier, while the remaining bits could provide aunique serial number for device to identify the drug in the reservoir.The microcontroller in this embodiment can keep track of up to 30devices for up to 60 days.

The electronics, which could be implemented in an ASIC could beconfigured to receive input from a temperature sensor or the ASIC couldhave an internal temperature sensor for disabling cartridges if drugtemperature exceeds a pre-defined temperature.

As discussed above, in order to provide the appropriate voltage to theactuator, a boost rail is charged to the desired voltage by making useof a boost converter configured to act as a charge pump. FIG. 47 is acircuit diagram of two boost converters—one that powers the piezo driveand another that provides a prescribed low current annulus charge(voltage). The monitoring is performed by an ADC in conjunction with amicrocontroller. FIG. 48 is a circuit diagram of one embodiment of amicrocontroller. The ADC, NCO, CWG, PWM, are all internal to that part.The ADC in this embodiment is an integrated device and can be switchedinside the chip between various pins. Initially it starts on pin RC2where it is used to monitor and maintain voltage of boost during Q-sweep(auto-tuning). As discussed above, the voltage has to be nearly constantor the result of the frequency sweep will provide a wrong result. TheADC is then switched to RA4, which allows the actuator (annulus) voltageto be charged and calibrated. Last of all, the ADC is switched to RA0,where the integrating peak detector scales the peak voltage to thevoltage range of the ADC. The measurement from the peak detector can beused to keep constant tank voltage or to grab amplitude coefficientsfrom the Q-sweep.

FIG. 49 shows a circuit diagram of one embodiment of a set of levelshifters driving a full bridge loaded with a resonant tank (includingpiezo). It also has peak detector feedback.

FIG. 50 shows one embodiment of a TEP pulldown/droplet on demandpulldown circuit composed of a level shifter and two NMOS FETS thatdrain the tank rather than letting it float when the full bridge stopsdriving.

While this invention has been described with reference to specificembodiments, it will be understood by those skilled in the art thatvarious changes may be made and equivalents may be substituted forelements thereof, without departing from the spirit and scope of theinvention. In addition, modifications may be made to adapt the teachingsof the invention to particular situations and materials, withoutdeparting from the essential scope thereof. Thus, the invention is notlimited to the particular examples that are disclosed herein, butencompasses all embodiments falling within the scope of the appendedclaims.

1. A device comprising: a droplet generator plate having a plurality ofopenings therethrough, and one or more channels for fluid communicationwith a reservoir of fluid, the droplet generator plate defining afluid-filled droplet generator plate when the openings are filled withfluid; an actuator coupled to the droplet generator plate; a drivercircuit in signal communication with the actuator, the driver configuredto drive the actuator into oscillation based on a drive waveform thatincludes at least two separate drive signals; and a feedback circuit insignal communication with the actuator and the driver circuit, whereinthe feedback circuit is configured to determine a relaxation time forinclusion in the drive waveform between drive signals in order to reducethe oscillation of the actuator between drive signals by a predeterminedamount.
 2. The device of claim 1, further comprising a back EMF sensorcoupled to the actuator, wherein the back EMF sensor is configured togenerate a feedback signal for use by the feedback circuit based on aback EMF generated by the actuator.
 3. The device of claim 2, whereinthe actuator comprises a piezoelectric component and the back EMF isgenerated by oscillation thereof.
 4. The device of claim 3, wherein theback EMF sensor comprises a conducting material mechanically coupled toand electrically isolated from the piezoelectric component.
 5. Thedevice of claim 1, wherein the duration of the drive signals is selectedto generate at least one droplet from at least some of the plurality ofopenings, during each drive signal.
 6. The device of claim 1, whereinthe driver circuit is configured to generate an active damping signalfollowing a drive signal, the active damping signal being configured toreduce the relaxation time based on the feedback signal.
 7. The deviceof claim 6, wherein the active damping signal has a phase and polarityconfigured to time match the feedback signal and oppose oscillation ofthe actuator.
 8. The device of claim 7, wherein the active dampingsignal has a magnitude and duration configured to energy match thefeedback signal and remove energy stored in the oscillation of theactuator.
 9. The device of claim 8, wherein the active damping signal isconfigured as a single pulse.
 10. The device of claim 1, wherein thedriver circuit comprises a full bridge circuit for generating the driverwaveform based on one or more oscillator outputs.
 11. The device ofclaim 10, further comprising an inductance circuit coupled to the drivercircuit between the full bridge circuit and the actuator, wherein theinductance circuit is configured to amplify the drive waveform.
 12. Thedevice of claim 1, wherein the feedback circuit includes a resonancedetector configured to identify a drive signal that drives the actuatorand fluid-filled droplet generator plate into resonance.
 13. A method ofgenerating droplets, the method comprising: actuating a dropletgenerator mechanism in fluid communication with a reservoir of fluidinto oscillation by means of discrete drive signals of defined duration,the droplet generator mechanism including a droplet generator plateincluding at least one opening configured to generate drops of the fluidwhen actuated; measuring the oscillation of the droplet generatormechanism loaded with the fluid; determining a relaxation time of thedroplet generator mechanism loaded with the fluid, following a drivesignal based on a defined reduction in oscillation, and generating thenext drive signal after a delay based on the relaxation time.
 14. Themethod of claim 13, wherein the droplet generator assembly includes apiezoelectric actuator mechanically coupled to the droplet generatorplate, and measuring the oscillation comprises sensing a back EMFgenerated by the piezoelectric actuator.
 15. The method of claim 14,further comprising generating an active damping signal after a drivesignal, configured to reduce the amplitude of the oscillation.
 16. Themethod of claim 15, wherein the active damping signal comprises a signalhaving a phase and polarity configured to time match and oppose theoscillation.
 17. The method of claim 15, wherein the active dampingsignal has a phase, duration, and magnitude configured to energy matchthe oscillation.
 18. A drive waveform for oscillating a piezoelectricmechanism, comprising a first drive signal and a second drive signal,wherein the second drive signal is separated from the first drive signalby a relaxation period, for allowing the piezoelectric mechanismoscillation to be reduced to a defined amplitude.
 19. The drive waveformof claim 18, wherein the drive waveform further comprises an activedamping signal following the first drive signal, the active dampingsignal being configured to reduce the duration of oscillation of thepiezoelectric mechanism.
 20. A system comprising: a droplet ejectorassembly including a piezoelectric actuator coupled to a dropletgenerator plate having a plurality of openings therethrough, the dropletgenerator plate defining a fluid-filled droplet generator plate when theopenings are filled with fluid; a drive signal generator electricallycoupled to the piezoelectric actuator, the drive signal generator beingconfigured to generate a drive signal for driving the piezoelectricactuator, and a controller electrically coupled to the actuator and thedrive signal generator, wherein the controller is configured to controlthe drive signal to drive the piezoelectric actuator at a resonancefrequency of the droplet generator assembly.
 21. The system of claim 20,wherein the controller is configured to determine the resonancefrequency based on a decay signal from the piezoelectric actuator. 22.The system of claim 20, wherein the controller includes a capacitor andan ADC to determine a time-energy product (TEP) of the decay signal. 23.The system of claim 21, wherein the controller comprises a resonantmeasurement and control circuit configured to determine the resonancefrequency of the piezoelectric ejector by controlling the drive signalgenerator to produce a set of frequency signals across a range offrequencies and monitoring the effect on the decay signal.
 24. Thesystem of claim 23, wherein the each frequency signal is repeatedmultiple times and the resultant TEP signal is monitored each time toensure consistency.
 25. The system of claim 20, wherein the drive signalcomprises at least two different frequency signals, the resonancefrequency being defined by interference between the at least twodifferent frequency signals.
 26. The system of claim 25, wherein each ofthe different frequency signals is non-resonant with respect to thedroplet ejector assembly.
 27. A method of operating a droplet ejectorassembly, the method comprising: applying a drive signal to a dropletejector assembly including a piezoelectric actuator coupled to afluid-loaded droplet generator plate; determining a resonance frequencyof the ejector assembly based on accumulated magnitude or peak value ofa feedback signal from the piezoelectric actuator, and controlling thedrive signal to drive the piezoelectric actuator at a resonancefrequency of the ejector assembly.
 28. A method of claim 27, wherein thedetermining of the resonance frequency is done following a test signalor following a drive signal.
 29. The method of claim 28, wherein thedrive signal is adjusted to account for changes in the resonancefrequency of the ejector assembly due to changes in one or more of, thecharacteristics of the fluid loaded into the droplet generator plate,the amount of fluid loading of the droplet generator plate, temperature,humidity, and pressure.
 30. The method of claim 29, wherein the changein the resonance frequency is based at least in part on one or more oftemperature, humidity, pressure, and drive voltage induced resonanceshift.
 31. The method of claim 27, wherein the feedback signal isdefined by a decay signal following a drive or test signal to theactuator.
 32. The method of claim 31, wherein determining of theresonance frequency comprises integrating the decay signal to determinean energy magnitude.
 33. The method of claim 27, wherein determining aresonance frequency is done following different test frequency signals,the method further comprising applying different frequency test signalsto the actuator across a range of frequencies.
 34. The method of claim33, wherein determining a resonance frequency is based on a time-energyproduct (TEP) signal from the actuator and obtained by integrating overthe TEP signal.
 35. The method of claim 27, wherein applying the drivesignal to the actuator comprises generating at least a first and asecond different drive frequency signal that separately are non-resonantwith respect to the fluid-loaded droplet generator plate, but togetherare resonant with respect to the fluid-loaded droplet generator plate.36. A droplet ejection device comprising: an ampoule or reservoir offluid; an ejector assembly comprising a droplet generator plate and apiezoelectric actuator coupled to the droplet generator plate, whereinthe droplet generator plate is in fluid communication with thereservoir, such that the droplet generator plate is loaded with thefluid, and a driver coupled to the piezoelectric actuator, wherein thedriver is configured to generate at least first and second drive signalsat different first and second drive frequencies, wherein the drivesignals are coupled to the piezoelectric actuator to oscillate theejector assembly at one or more resonance frequencies.
 37. The dropletejection device of claim 36, further comprising a controller configuredto determine a shift in one or more of the resonance frequencies and tocontrol at least one of the first and second drive frequencies based onthe shift, such that the ejector assembly is oscillated at a resonancefrequency.
 38. The droplet ejection device of claim 37, wherein thecontroller is configured to determine the shift in the resonancefrequency based on a decay signal from the actuator, in the absence ofthe drive signals.
 39. The droplet ejection device of claim 36, whereinthe drive signals are non-resonant with respect to the droplet generatorplate loaded with the fluid, such that the actuator oscillates theejector assembly at the resonance frequency based on interferencebetween the first and second drive frequencies.
 40. A method fordetecting when an electromechanical system comprising a piezoelectricactuator is operating in a resonance mode, the method comprising: a.applying a drive signal to the piezoelectric actuator for a finiteperiod of time; b. removing the drive signal from the piezoelectricactuator; c. activating a measuring circuit coupled to the piezoelectricactuator; d. receiving in the measuring circuit a detected signal fromthe piezoelectric actuator, and e. determining whether theelectromechanical system is in a resonance mode based on the nature ofthe detected signal.
 41. The method of claim 40, wherein the resonancemode is determined based on the duration of a decay signal from theactuator following the removal of the drive signal or based on the peakvalue or total energy of the decay signal
 42. The method of claim 40,further comprising the step of changing a frequency of the drive signalin the event that the electromechanical system is not operating in aresonance mode and repeating the steps a. through e.
 43. The method ofclaim 41, further comprising the step of integrating over the decaysignal.
 44. The method of claim 40, wherein the electromechanical systemis operable in multiple resonance modes, and the method furthercomprises determining a best mode of the multiple resonance modes foroperation of the electromechanical system.
 45. A method of providing adrive waveform for maximizing the physical displacement of a mechanicalload coupled to a piezoelectric actuator, the method comprising:providing two or more input signals, and combining the input signals toproduce a combined drive signal, wherein the two or more input signalsare selected such that the combined drive signal has a frequency equalto at least one resonant frequency of the mechanical load coupled to thepiezoelectric actuator.
 46. The method of claim 45, wherein at least oneinput signal is amplitude and phase-weighted such that the piezoelectricactuator achieves maximum physical displacement of the mechanical load.47. The method of claim 45, wherein the two or more input signals areselected such that one signal has a frequency at which the piezoelectricactuator provides improved displacement of the mechanical load, and theother signal has a frequency at which the piezoelectric actuatorprovides improved displacement velocity of the mechanical load.
 50. Themethod of claim 47 wherein at least one input signal is chosen to be ata resonant frequency of the mechanical load coupled to the piezoelectricactuator.
 51. The method of claim 47 wherein the mechanical load isnon-rectangular, and wherein at least one input signal operates at aBessel mode frequency.
 52. A piezoelectric ejector device for ejectingdroplets of fluid, comprising an ejector mechanism including apiezoelectric actuator and a droplet generator plate, and driverelectronics for driving the actuator, the electronics including amicrocontroller configured to perform auto-tuning of the ejectormechanism by identifying and setting an optimum spray frequency.
 53. Thepiezoelectric ejector device of claim 52, wherein auto-tuning involvesthe generation of at least one cycle of each of a range of drive signalfrequencies over a predefined frequency range and obtaining time-energyproduct (TEP) feedback from a decay signal emitted by the actuatorfollowing each frequency generation.
 54. The piezoelectric ejectordevice of claim 53, wherein multiple separate cycles are generated foreach frequency in quick succession in order to charge a capacitor in anintegrating peak detector with the same amplitude coefficient (voltage)for each cycle, the amplitude coefficient being recorded and theprocedure repeated at the next frequency.
 55. The piezoelectric ejectordevice of claim 53, further comprising at least one numericallycontrolled oscillator (NCO) for incrementing the frequencies over thepredefined frequency range.
 56. The piezoelectric ejector device ofclaim 53, wherein power is supplied to the actuator from at least onebattery, the microcontroller being configured to monitor the batteryvoltage and compensate for gradual depletion of the battery.
 57. Thepiezoelectric ejector device of claim 53, wherein power is supplied tothe actuator from at least one battery and the driver electronicsincludes a boost circuit for charging a boost rail to a desired voltagefor driving the actuator.
 58. The piezoelectric ejector device of claim57, wherein the boost rail is charged to a constant voltage by usingsampling feedback from the ADC.
 59. The piezoelectric ejector device ofclaim 58, further comprising at least one inductor to define a resonanttank with the piezoelectric actuator, which acts as a capacitor.
 60. Thepiezoelectric ejector device of claim 54, wherein the microcontroller isconfigured to maintain a constant voltage at each drive signal frequencyduring auto-tuning, using the ADC to monitor the drive voltage to ensurea drive voltage that is high enough to properly drive energy into thepiezoelectric actuator while maintaining the voltage at a low enoughlevel to avoid unwanted ejection.
 61. The piezoelectric ejector deviceof claim 59, wherein the boost circuit is configured to act as a chargepump to raise the piezoelectric actuator voltage to a prescribed voltageafter auto-tuning.
 62. The piezoelectric ejector device of claim 61,wherein the driver electronics includes a drive circuit comprising twoNCOs, logic for combining signals from the two NCOs to define a combinedsignal, a complementary waveform generator (CWG) for receiving thecombined signal, a level shifter circuit connected to the CWG, and afull bridge connected to the level shifter and operable to drive thepiezoelectric actuator with a drive signal for ejecting the fluid. 63.The piezoelectric ejector device of claim 62, wherein themicrocontroller is configured to constantly adjust the boost duty cycleto balance the boost output voltage and thus the amplification in theresonant tank to provide a constant voltage drive.
 64. The piezoelectricejector device of claim 62, wherein the microcontroller is configured tocharge the boost rail up and then turn the drive circuit on causingmassive overshoot for high velocity spray to provide an overshoot drive.65. The piezoelectric ejector device of claim 62, wherein themicrocontroller is configured to keep the drive signal at a constantfrequency.
 66. The piezoelectric ejector device of claim 62, wherein themicrocontroller is configured to dither the drive signal by sweeping thefrequency of the drive signal over a defined bandwidth.
 67. Thepiezoelectric ejector device of claim 62, wherein the logic combinessignals from the two NCO to define a combined signal that disables theCWG periodically to provide two anti-phase square waves with adjustabledead bands to the level shifter circuit.